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Fluid sensor and mass flow controller

A technology of fluid sensor and mass flow, which is applied in flow control, indirect mass flow meter, mass flow measurement device, etc., can solve the problems that the fluid sensor cannot meet, the measurement accuracy is difficult to be guaranteed, and the fluid sensor cannot meet the reliability requirements, etc. Achieve the effect of improving reliability and ensuring measurement accuracy

Pending Publication Date: 2020-01-24
BEIJING SEVENSTAR FLOW CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] For existing fluid sensors, only when the measured flow is within a certain flow range (usually 25%-100% of the full-scale flow of the fluid sensor), the measurement accuracy can meet the requirements, and the measured flow is within 25% of the full-scale flow. % below, the measurement accuracy is difficult to be guaranteed, and in the field of semiconductors, the existing fluid sensors cannot meet the higher precision requirements proposed by the rapid development of this field
In addition, in some fields with high reliability requirements, such as aerospace and nuclear fields, the existing design of fluid sensors cannot meet the reliability requirements of these fields

Method used

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Embodiment Construction

[0039] In order for those skilled in the art to better understand the technical solution of the present invention, the fluid sensor and the mass flow controller provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0040] The fluid sensor provided by the present invention includes at least two measuring tubes, and the diameters of the at least two measuring tubes have a proportional relationship.

[0041] In practical applications, by setting different proportional relationships, different fluid flow ratios of the at least two measuring tubes can be obtained, so as to meet the requirements for measurement accuracy and reliability in different usage occasions.

[0042] For example, in fields such as aerospace, nuclear, etc., the reliability of fluid sensors is very high. For this requirement, the diameters of the two measuring tubes can be the same, so that one of the measuring tubes can be selected for work, while the...

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Abstract

The invention provides a fluid sensor and a mass flow controller. The fluid sensor comprises at least two measuring tubes, wherein the tube diameters of the at least two measuring tubes have a proportional relation. The fluid sensor provided by the invention can ensure the measurement precision in the whole measurement range, and can also improve the reliability of the device.

Description

technical field [0001] The invention relates to the field of fluid measurement, in particular to a fluid sensor and a mass flow controller. Background technique [0002] There are many types of measuring devices used to measure fluid flow and their applications are numerous. Fluid sensors have important applications in scientific research and production in various fields such as semiconductor microelectronics industry, special material development, chemical industry, petroleum industry, medicine, environmental protection and vacuum. As productivity levels in these applications increase, so do the demands placed on fluid sensors. Especially in semiconductor and large-scale integrated circuit production lines, not only high measurement accuracy and wide measurement range are required for fluid sensors, but also reliable performance is required. [0003] For existing fluid sensors, only when the measured flow is within a certain flow range (usually 25%-100% of the full-scale ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D7/06G01F1/86
CPCG05D7/0635G01F1/86G01F1/68G01F15/005G01F7/00G05B19/416G05B2219/37371
Inventor 苏乾益宋志辉陈正堂
Owner BEIJING SEVENSTAR FLOW CO LTD