Magnetic field probe station

Abstract

The invention proposes a magnetic field probe station. The magnetic field probe station comprises a tabletop, at least one pair of probe seats, at least one pair of electrical probes, at least one pair of in-plane magnetic poles, a magnetic conduction structure, an excitation coil, an excitation coil power supply unit and a tabletop support device. Compared with a traditional probe station structure, the magnetic conduction structure and the excitation coil are placed below the tabletop, and no interference to the arrangement of the electrical probes and an optical module is caused; moreover,the space is saved, and a sample table and a vertical magnet below the tabletop can be allowed to be arranged; and when an objective is rotated and switched, the situation that the objective in the optical module touches the coil due to excessively large size of the excitation coil is prevented. A magnetic pole fixing mode proposed by the invention is set to be a mode of an adjustable distance between the magnetic poles, a distance between the magnetic poles is set according to test demand, different test demands are adapted, and the magnetic field probe station also can be cooperatively usedwith a magneto-optical Kerr microscope.

Description

Technical field: [0001] The invention belongs to the technical field of testing and measurement, in particular to a magnetic field probe station. Background technique: [0002] Measurement systems capable of integrating magnetic, electrical and optical modules are of great use for the testing of electronic devices. However, because the magnetic field generation module (including electromagnet), electrical module (including DC / high frequency AC probe, etc.), and optical detection module (including objective lens, etc.) all need to occupy space and are incompatible, it brings great difficulty to system integration . In order to achieve a higher magnetic field, it is generally necessary to use a ferromagnetic material as a magnetic pole or magnetic shoe, and the magnetic pole or magnetic shoe needs to be close to the sample. At the same time, in order to make the system compatible with the needs of optical testing, there needs to be enough space above the probe station near t...

AI Technical Summary

Problems solved by technology

In particular, when using a high magnification objective lens for imaging measurement, the distance between the sample and the objective lens needs to be very close (that is, the sample must be located at the focal point of the objective lens imaging), which is a compatible configuration of the magnetic field generating device, electrical testing device and optical module bring challenges

[0003] The current various probe stations are difficult to realize the integration of multi-dimensional magnetic fields, DC / AC probes and high-magnification microscopic imaging

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