Method and device for measuring ion beam eccentric angle of Hall ion source
A Hall ion source and eccentricity angle technology, applied in the field of image processing, can solve the problem of difficulty in measuring the eccentricity angle of the ion beam, and achieve the effect of rapid measurement and evaluation
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[0032] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and preferred embodiments. However, it should be noted that many details listed in the specification are only to enable the reader to have a thorough understanding of one or more aspects of the present invention, and these aspects of the present invention can be implemented even without these specific details.
[0033] This embodiment provides a method for measuring the eccentric angle of the ion beam of the Hall ion source. The schematic diagram is as follows: figure 1 As shown, by using a photo of the circumferential discharge channel of the Hall ion source taken by a CCD camera, the photo is imported into MATLAB for processing and converted into a photo matrix format; MATLAB calculates the pixel value distribution in the photo image and calculates the ion beam The...
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