1results about How to "Rich measurement methods" patented technology

The application belongs to the technical field of photoelectric detection, and discloses a kind of line spectrum confocal sensor's calibrating device and calibrating method.The device includes integrated standard, displacement generating device, displacement measuring device and driving device, driving device drives displacement generating device to generate vertical displacement, displacement measuring device measures the displacement generated in vertical direction, when displacement generating device occurs displacement in vertical direction, integrated standard is moved in vertical direction;Line spectrum confocal sensor measures the profile displacement of integrated standard in vertical direction, and compares the measured result with the result measured by displacement measuring device, to obtain the extreme position error of line spectrum confocal sensor in vertical measurement plane in transverse and vertical direction, and establishes error model.Through the application, the problems that existing line spectrum confocal sensor is difficult to calibrate and cannot be calibrated are solved.