A bionic strain sensor with omnidirectional perception and its preparation method

Abstract

The invention discloses an omnidirectional sensing bionic strain sensor and a preparation method thereof, wherein the omnidirectional sensing bionic strain sensor includes a flexible elastic base, and a micro-nano groove array is recessed in the flexible elastic base, covering the flexible elastic base. The conductive layer of the elastic substrate and the micro-nano groove array, and the first electrode and the second electrode arranged on the conductive layer; the micro-nano groove array includes N identical micro-nano grooves, the The micro-nano grooves are evenly distributed around the circumference of the virtual central circle to form a circular array, and N is an integer greater than 1. The omnidirectional perceptual bionic strain sensor of the present invention contains a circular array of micro-nano grooves uniformly distributed around the circumference of the virtual central circle on a flexible elastic substrate, which can sense plane stress and strain from any direction while avoiding Excessive stress concentration effect occurs at the center of the strain sensor; the structure is simple, has good durability, and the measurement has high sensitivity, high accuracy and good reproducibility.

Description

technical field [0001] The invention relates to the technical field of strain sensors, in particular to an omnidirectional sensing bionic strain sensor and a preparation method thereof. Background technique [0002] Resistance strain gauge is a commonly used element used to measure the degree of deformation of the measured object; it can convert the change of strain on the mechanical component into the change of resistance. The measurement principle of the resistance strain gauge is as follows: the evaporated metal wire on the resistance strain gauge is attached to the substrate, which is usually a polyimide film. Deformation will occur, and the metal wire is subjected to tensile or compressive stress. According to the resistance R=ρL / S, the resistance of the metal wire is related to the resistivity of the material, the length of the wire, and the cross-sectional area, and the resistance changes with the external force. In a nutshell, resistance strain gauges use the strain...

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Problems solved by technology

[0005] In view of the above deficiencies in the prior art, the object of the present invention is to provide an omnidirectional sensing bionic strain sensor and its preparation method, aiming at solving the problems of poor accuracy, sensitivity and reproducibility of the existing strain measuring elements

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