Suspension array hole graphene MEMS micropressure sensor and fabrication method thereof

A technology of micro-pressure sensor and array hole, which is applied in the field of MEMS pressure sensor chip, can solve the problems of low sensitivity and linearity, achieve high sensitivity, good linearity, and increase the effect of membrane strain
CN110793682AInactive Publication Date: 2020-02-14XI AN JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XI AN JIAOTONG UNIV
Publication Date
2020-02-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a suspension array hole graphene MEMS micropressure sensor and a fabrication method thereof. The suspension array hole graphene MEMS micropressure sensor comprises a silicon substrate, wherein a back cavity is formed in the silicon substrate, an upper SiO2 thin film layer and an upper silicon nitride thin film layer are sequentially arranged on an upper surface of the silicon substrate, a lower SiO2 thin film layer and a lower silicon nitride thin film layer are sequentially arranged on a lower surface of the silicon substrate, a graphene thin film is arranged on the upper silicon nitride thin film layer, a first electrode and a second electrode are arranged on the graphene thin film and are connected to a Wheatstone full-bridge circuit by wires, and a plurality ofthrough holes are formed in the upper SiO2 thin film layer and the lower silicon nitride thin film layer which are suspended between the graphene thin film and an upper opening of the back cavity. Inthe suspension array hole graphene MEMS micropressure sensor, the plurality of through holes are formed in a support thin film, increased film strain is partially generated in the graphene thin film above the through holes, the strain force can be increased, and the sensitivity and the linearity of a chip can be improved.
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Description

technical field

[0001] The invention belongs to the technical field of micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) pressure sensor chips, in particular to a suspended array hole graphene MEMS micro-pressure sensor chip and a preparation method thereof. Background technique

[0002] MEMS micro-pressure sensors have attracted much attention due to their small size, light weight, and high precision. Their micro-pressure measurement range is within 100 Pa, and they can be used in many special occasions. The research on graphene's outstanding mechanical, optical and electrical properties has become a hot spot that people pay close attention to. It has a high Young's modulus (about 1TPa) and a carrier mobility as high as 200 000cm 2 ·V -1 ·s -1 , and graphene itself has a good piezoresistive effect, no need to make additional electrodes, the elastic modulus of graphene is 335N / m, and the gauge factor is only 2, which shows that graphene is basically n...

Claims

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