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Suspension array hole graphene MEMS micropressure sensor and fabrication method thereof

A technology of micro-pressure sensor and array hole, which is applied in the field of MEMS pressure sensor chip, can solve the problems of low sensitivity and linearity, achieve high sensitivity, good linearity, and increase the effect of membrane strain

Inactive Publication Date: 2020-02-14
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The sensitivity and linearity of the current traditional silicon pressure sensor and similar graphene pressure sensor chips are low, which cannot meet the requirements. There is an urgent need for a new suspended array hole graphene MEMS micro pressure sensor chip

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  • Suspension array hole graphene MEMS micropressure sensor and fabrication method thereof
  • Suspension array hole graphene MEMS micropressure sensor and fabrication method thereof

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Embodiment Construction

[0037] In order to make the purpose, technical effects and technical solutions of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention are clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention; obviously, the described embodiments It is a part of the embodiment of the present invention. Based on the disclosed embodiments of the present invention, other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall all fall within the protection scope of the present invention.

[0038] see figure 1 and figure 2 , a suspended array hole graphene MEMS micro-pressure sensor chip according to an embodiment of the present invention, comprising: a silicon substrate 1 , a silicon dioxide thin film layer, a silicon nitride thin film layer and a graphene thin film layer 3 . The silicon dioxide film layer com...

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Abstract

The invention discloses a suspension array hole graphene MEMS micropressure sensor and a fabrication method thereof. The suspension array hole graphene MEMS micropressure sensor comprises a silicon substrate, wherein a back cavity is formed in the silicon substrate, an upper SiO2 thin film layer and an upper silicon nitride thin film layer are sequentially arranged on an upper surface of the silicon substrate, a lower SiO2 thin film layer and a lower silicon nitride thin film layer are sequentially arranged on a lower surface of the silicon substrate, a graphene thin film is arranged on the upper silicon nitride thin film layer, a first electrode and a second electrode are arranged on the graphene thin film and are connected to a Wheatstone full-bridge circuit by wires, and a plurality ofthrough holes are formed in the upper SiO2 thin film layer and the lower silicon nitride thin film layer which are suspended between the graphene thin film and an upper opening of the back cavity. Inthe suspension array hole graphene MEMS micropressure sensor, the plurality of through holes are formed in a support thin film, increased film strain is partially generated in the graphene thin film above the through holes, the strain force can be increased, and the sensitivity and the linearity of a chip can be improved.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical system (Micro-Electro-Mechanical System, MEMS) pressure sensor chips, in particular to a suspended array hole graphene MEMS micro-pressure sensor chip and a preparation method thereof. Background technique [0002] MEMS micro-pressure sensors have attracted much attention due to their small size, light weight, and high precision. Their micro-pressure measurement range is within 100 Pa, and they can be used in many special occasions. The research on graphene's outstanding mechanical, optical and electrical properties has become a hot spot that people pay close attention to. It has a high Young's modulus (about 1TPa) and a carrier mobility as high as 200 000cm 2 ·V -1 ·s -1 , and graphene itself has a good piezoresistive effect, no need to make additional electrodes, the elastic modulus of graphene is 335N / m, and the gauge factor is only 2, which shows that graphene is basically n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/18
CPCG01L1/18
Inventor 赵玉龙张栋梁张琪马鑫庞星同笑珊刘明杰刘元邵一苇
Owner XI AN JIAOTONG UNIV
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