Metal mask, display panel and display device

A metal mask, display panel technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of uneven thickness and long uneven range of packaging inorganic layer film, and achieve long-term use High stability, high production yield and good thickness uniformity

Active Publication Date: 2020-02-25
BOE TECH GRP CO LTD +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

refer to figure 1 , due to the sagging phenomenon of the metal mask 100 under the action of gravity, the gap (Gap) value G between the central area A and the edge area B and the substrate 200 is different, resulting in the film packaging inorganic layer at different positions Uneven thickness, especially ref. figure 2 , resulting in a film thickness of 10% to 90% of the thickness gradient area (Shadow) C non-uniformity range is longer

Method used

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  • Metal mask, display panel and display device
  • Metal mask, display panel and display device
  • Metal mask, display panel and display device

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Embodiment Construction

[0045] The following describes the embodiments of the present invention in detail, and those skilled in the art will understand that the following embodiments are intended to explain the present invention, and should not be regarded as limiting the present invention. Unless otherwise specified, in the following examples that do not explicitly describe specific techniques or conditions, those skilled in the art can carry out according to commonly used techniques or conditions in this field or according to product instructions.

[0046] In one aspect of the invention, the invention provides a metal reticle.

[0047] According to an embodiment of the present invention, refer to image 3 The metal reticle 100 includes an opening area O and a peripheral area R, the peripheral area R is disposed around the opening area O, and the peripheral area R is provided with a first half-cut groove 101 , and the first half-cut groove 101 is disposed around the opening area O. In this way, on ...

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Abstract

The invention provides a metal mask, a display panel and a display device. The metal mask plate comprises an opening area and a peripheral area, wherein the peripheral area is arranged around the opening area, the peripheral area is provided with a first half notch groove, and the first half notch groove is arranged around the opening area. According to the metal mask provided in the invention, byintroducing the first half notch groove arranged around the opening area into the peripheral area, the sagging amount of the metal mask can be effectively improved, and the net stretching force of the metal mask can be reduced, so that the thickness uniformity of an inorganic packaging layer formed by using the metal mask at different positions is improved, and the manufacturing yield of the display panel is higher.

Description

technical field [0001] The present invention relates to the technical field of display manufacturing, in particular, the present invention relates to a metal mask, a display panel and a display device. Background technique [0002] In the current active matrix organic light emitting diode (AMOLED) thin film packaging technology, a metal mask (Mask) is used to pattern the packaging inorganic layer. refer to figure 1 , due to the sagging phenomenon of the metal mask 100 under the action of gravity, the gap (Gap) value G between the central area A and the edge area B and the substrate 200 is different, resulting in the film packaging inorganic layer at different positions Uneven thickness, especially with reference to figure 2 , resulting in a longer range of non-uniformity in the thickness gradient area (Shadow) C of 10% to 90% of the film thickness. Contents of the invention [0003] The present invention has been accomplished based on the following findings of the inve...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L51/52H01L27/32
CPCH10K59/12H10K50/844H10K71/00C23C14/042
Inventor 王世龙蒋志亮
Owner BOE TECH GRP CO LTD
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