Reduction Furnace Sequence Control Method Based on DCS System of Polysilicon Production Plant

Abstract

The invention discloses a reduction furnace sequence control method based on the DCS system of a polycrystalline silicon production device. The specific program operation steps are: S1, the initial discharge sequence control program; S2, the pressure inspection sequence control program; S3, the gas replacement sequence control program; S4, Main reaction preparation sequence control program; S5, material feeding ramp program and step switching program in the main reaction stage; S6, main reaction shutdown sequence control program; S7, nitrogen replacement sequence control program; S8, vacuum pumping sequence control program. The invention realizes a highly automatic sequence control program, does not require frequent manual operations, significantly reduces the operating frequency and labor intensity of employees, reduces the interference of human factors, and ensures the safe and stable operation of the reduction furnace. At the same time, the automatic control program realizes the polysilicon production process The medium feed is continuously stable, thereby significantly improving the stability of product quality.

Description

technical field [0001] The invention relates to the technical field of automatic control, in particular to a reduction furnace sequence control method based on the DCS system of a polysilicon production device. Background technique [0002] The start-up, normal operation, and shutdown of the reduction furnace in the polysilicon industry require manual operations by high-quality operators. When starting up, perform initial exhaust, gas replacement, and pressure leakage checks, observe the vacuum pipeline pressure, and adjust the flow of each part to ensure normal operation. When feeding TCS and H2, it is required to achieve material balance and energy balance. During the shutdown process, all aspects must be taken into account and slow down to prevent damage to the equipment. The operation is cumbersome and the workload is heavy, especially when multiple reduction furnaces are started, run normally and shut down at the same time. , It is easy to cause misoperation, and due to...

AI Technical Summary

Problems solved by technology

[0002] The start-up, normal operation, and shutdown of the reduction furnace in the polysilicon industry require manual operations by high-quality operators. When starting up, perform initial exhaust, gas replacement, and pressure leakage checks, observe the vacuum pipeline pressure, and adjust the flow of each part to ensure normal operation. When feeding TCS and H2, it is required to achieve material balance and energy balance. During the shutdown process, all aspects must be taken into account and slow down to prevent damage to the equipment. The operation is cumbersome and the workload is heavy, especially when multiple reduction furnaces are started, run normally and shut down at the same time. , it is easy to cause misoperation, and due to the difference in the control level of the operators, the difference in the operation of the reduction furnace is relatively large, which is not conducive to the stable operation of the production device and the stable improvement of product quality

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