A miniature gate valve device for high vacuum

Abstract

The invention discloses a micro gate valve device for high vacuum. The micro gate valve device comprises a sample platform for loading a sample to be detected, a sealing chamber for enclosing the sample, and a conveying mechanism, wherein the sealing chamber is used for isolating the sample from the atmospheric environment, making the sample into a high vacuum environment, and allowing the sampleto leave the high vacuum environment for sample recovery and transfer; the conveying mechanism is connected with the sealing chamber; and the sealing chamber is a closed space formed by a first sealing sliding block and a second sealing sliding block, and the first sealing sliding block and the second sealing sliding block are matched through a wedge-shaped structure, so that the first sealing sliding block can horizontally and positively push and horizontally and reversely pull the second sealing sliding block to move. The sample is loaded in the micro gate valve device, so that the sample tobe detected is isolated from the atmospheric environment in the processes of sample preparation, transfer, observation and recovery, the whole process from sample preparation to observation to recovery of the sample to be detected is ensured to be completed in an inert gas or vacuum environment, and the reliability and accuracy of a detection result can be greatly improved.

Description

technical field [0001] The invention relates to a high vacuum sealing device, in particular to a high vacuum micro plug-in valve device. Background technique [0002] With the rapid development of modern microscopic analysis technology, scanning electron microscope (SEM), focused ion beam-electron beam electron microscope double-beam electron microscope (FIB), X-ray photoelectron spectroscopy, etc. have become indispensable for characterizing the microscopic morphology and composition of substances. missing instruments. These instruments use electron beams, X-rays, etc. as light sources, and interact with the sample to obtain information on the microstructure and composition of the sample. When performing this type of detection, the sample to be tested first enters the instrument exchange chamber from the air, and then enters the instrument sample chamber from the instrument exchange chamber for analysis. [0003] SEM, X-ray energy spectrometer, FIB and other instruments n...

AI Technical Summary

Problems solved by technology

However, different models of high-vacuum instruments from different manufacturers have different sample exchange chambers, so there is a common disadvantage of low versatility, which can no longer meet the increasingly diverse needs of microscopic analysis.

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