Preparation method of sequencing chip, sequencing chip and sequenator

Abstract

The invention provides a preparation method of a sequencing chip. The preparation method comprises the following steps of removing a natural oxidization layer of a surface to be processed of a chip, to obtain a bare chip surface, and then cleaning the bare chip surface; sequentially forming an oxidization layer and an HDMS layer on the bare chip surface; and through etching of photoresist, formingarray patterns on the HDMS layer, then performing etching for removing the exposed HDMS layer, performing deposition of an amino layer on a surface layer which is exposed after the HDMS layer is removed, and after the photoresist is removed, obtaining the sequencing chip. According to the method disclosed by the invention, the oxidization layer is re-generated for replacing the natural oxidization layer, so that the intensity of fluorescence signals can be effectively strengthened. Besides, through combination with the arrangement of a reflecting layer and metal grids, the intensity of the fluorescence signals is significantly strengthened when the chip is tested, and besides, signal crosstalk between adjacent pixels is isolated; and a sequenator using the chip is high in testing right rate, and is suitable for quick and efficient sequencing.

Description

technical field [0001] The invention relates to the technical field of nucleic acid molecule sequencing, in particular to a method for preparing a sequencing chip, a sequencing chip, and a sequencer. Background technique [0002] This section is intended to provide a background or context for implementations of the invention that are recited in the claims. The descriptions herein are not admitted to be prior art by inclusion in this section. [0003] The sequencing of biological main genetic material (such as deoxyribonucleic acid, referred to as DNA, composed of 4 kinds of deoxynucleotides A, T, C, and G) has played an increasingly important role in disease detection, drug development, and precision medicine. role. The development of sequencing technology has gradually evolved from the early Sanger manual sequencing method, the first-generation fluorescent label Sanger method, and the second-generation array sequencing technology to the third-generation direct sequencing ...

AI Technical Summary

Problems solved by technology

[0004] It can be seen from the above that the sequencing chip is the key, the carrier of DNA molecules, and its performance directly affects the accuracy of sequencing. However, companies rarely disclose the technology of their sequencing chips, and their preparation process, structure and performance can be optimized. Less reported

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