Sintering bearing plate and sintering method of planar ceramic target material

A ceramic target material and sintering method technology, which is applied in the field of ceramic target material sintering, can solve problems such as reducing friction, and achieve the effects of reducing friction, promoting full sintering, and preventing deformation

Inactive Publication Date: 2020-04-14
广州市尤特新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies of the prior art and provide a sintering method for setter plates and planar ceramic targets. Sintering on the plate can greatly reduce the friction between the target green body and the setter plate due to shrinkage during sintering, which is beneficial to the densification of the target, prevents defects such as deformation and cracking of the target, and greatly improves the accuracy of the target. material yield

Method used

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  • Sintering bearing plate and sintering method of planar ceramic target material
  • Sintering bearing plate and sintering method of planar ceramic target material
  • Sintering bearing plate and sintering method of planar ceramic target material

Examples

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Embodiment 1

[0032] A method for sintering a planar ceramic target, the steps are as follows:

[0033] 1) ZnO / Al 2 o 3 The AZO granulated powder with a composition ratio of 98:2wt% was successively strengthened by steel mold dry pressing and cold isostatic pressing to obtain a green body with a density greater than 56%, with a size of W400×L800×H15mm;

[0034] 2) if Figure 1-4 As shown, the alumina setter of this embodiment includes a support surface 1 and a horizontal surface 2, the support surface 1 is an inclined surface with an inclined angle to the horizontal surface 2, and the inclination angle of the support surface 1 relative to the horizontal surface 2 is 10°, and the support surface The bottom edge of the bottom edge is provided with a baffle plate 3, and the baffle plate 3 is perpendicular to the support surface 1; the support surface 1 is provided with several evenly spaced and parallel strip corrugated protrusions 5, and the strip corrugated protrusions 5 The cross section...

Embodiment 2

[0037] A method for sintering a planar ceramic target, the steps of which are basically the same as in Example 1, except that in this example, the inclination angle of the support surface of the setter relative to the horizontal plane is 15°.

Embodiment 3

[0039] A method for sintering a planar ceramic target, the steps of which are basically the same as in Example 1, except that in this example, the inclination angle of the support surface of the setter plate relative to the horizontal plane is 20°.

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Abstract

The invention discloses a sintering bearing plate and a sintering method of a planar ceramic target material. The burning bearing plate comprises a supporting surface and a horizontal plane, wherein the supporting surface is an inclined plane forming an inclination angle with the horizontal plane, the inclination angle of the supporting surface relative to the horizontal plane is 10-30 degrees, and the supporting surface is provided with a plurality of strip-shaped corrugated protrusions which are evenly distributed at intervals and are parallel to one another. A planar ceramic target materialgreen body is placed on the burning bearing plate with the strip-shaped corrugated bulges on the inclined surface for sintering, air permeability of a target material is improved, sufficient sintering of the target material can be promoted, the inclination angle of the supporting surface of the sintering bearing plate relative to the horizontal plane is 10-30 degrees, the friction force between atarget material green body and the sintering bearing plate due to shrinkage during sintering can be greatly reduced, target material densification is facilitated, defects of deformation, cracking andthe like of the target material are prevented, and the yield of the target material is greatly increased.

Description

technical field [0001] The invention relates to the technical field of ceramic target sintering, in particular to a sintering method for a setter plate and a planar ceramic target. Background technique [0002] Ceramic target is a very important class of vacuum coating materials, such as ZnO, AZO, GZO, IZO, IGZO, ITO, TiO 2 , Nb 2 o 5 Wait. The ceramic target is a ceramic material obtained by mixing, granulating, molding and sintering one or more oxide powders. After years of development, at present, although the production of ceramic targets has borrowed a lot from the preparation process of traditional ceramics, there are still problems such as insufficient sintering density, cracking, and holes, and there is still a lot of room for improvement in the sintering process. [0003] In the traditional process of ceramic target sintering, there are two main ways to place the green body: one is to place the green body directly on a sintering plate such as alumina, and then p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27D5/00C04B35/64
CPCC04B35/64F27D5/00
Inventor 许积文雷雨周志宏肖世洪杨永添
Owner 广州市尤特新材料有限公司
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