Micro-Pa magnitude water vapor generator and applications thereof
A water vapor generator, Pa-scale technology, applied in gas generating devices, instruments, measuring devices, etc., can solve the problems of restricting the development of water vapor reaction, high price, etc., to reduce the experimental cost, reduce the waste of raw materials, and reduce the demand. Effect
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[0050] As shown in the figure, the micropascal water vapor generator of this embodiment includes a generator body, a fine-tuning valve, and a water vapor delivery pipeline for connecting with a reactor. Wherein, the main body of the generator is connected with the water vapor delivery pipeline, and the fine-tuning valve is arranged on the water vapor delivery pipeline. In this implementation, the reactor adopts an ultra-vacuum chamber.
[0051] In this embodiment, the main body of the generator includes a cooling part, a sublimation part, an open end, and a cooling assembly. The cooling part is a rectangle with one end open, and the sublimation part is a tube with two ends open. One end opening of the sublimation part is connected with the cooling part, and the opening end is arranged at the other end opening of the sublimation part. The inlet end is movably connected with the sublimation part, and the inlet end can be opened and closed relative to the sublimation part, so th...
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