Capacitance-cantilever beam miniature electric field measurement sensing device based on inverse piezoelectric effect

An inverse piezoelectric effect and electric field measurement technology, applied in the field of electric field sensing, can solve the problems of large volume of laser source and laser measurement device, high cost of optical electric field sensing device equipment, poor temperature stability, etc. The effect of low cost and high temperature stability

Pending Publication Date: 2020-04-17
TSINGHUA UNIV
View PDF11 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the equipment cost of the optical electric field sensor is very high, the laser source and the laser measurement device occupy a large volume, and the temperature stability is poo

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Capacitance-cantilever beam miniature electric field measurement sensing device based on inverse piezoelectric effect
  • Capacitance-cantilever beam miniature electric field measurement sensing device based on inverse piezoelectric effect
  • Capacitance-cantilever beam miniature electric field measurement sensing device based on inverse piezoelectric effect

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] image 3 It is a schematic diagram of the response of the capacitive-cantilever miniature electric field measurement sensor device based on the inverse piezoelectric effect under the electric field, such as image 3 As shown, the upper electrode of the capacitor and the lower electrode of the capacitor are connected to an external measuring device by bonding. External measuring equipment can use B1500A semiconductor parameter tester or HP4284 dielectric spectrometer, etc.

[0034] The electric field measuring sensor device of the present invention utilizes the inverse piezoelectric effect of the piezoelectric material to deform the piezoelectric material under the electric field and drive the semiconductor thin film cantilever beam to bend longitudinally. Bending of the cantilever translates into a change in capacitance.

[0035] The device of the invention has high sensitivity and temperature stability, and has a wide electric field measurement range at the same time...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

A capacitance-cantilever beam micro electric field measurement sensing device based on an inverse piezoelectric effect comprises a substrate, and the substrate can be made of glass, silicon and othermaterials. The substrate is fixedly connected with one end of a semiconductor film. The semiconductor film covers the substrate. An upper electrode and a piezoelectric layer are arranged on the top surface of the semiconductor film. A rectangular cavity is formed in the middle of the top surface of the substrate. A lower electrode is arranged in the cavity. A gap of a C-shaped structure is formedin the piezoelectric layer along the edge of the cavity. The cavity is communicated with the outside through the gap. The device has the advantages that the sensitivity of the device is improved; themeasurement sensitivity and the response linearity can be improved; the structure is compatible with a micromachining mode; industrial mass production can be conducted; the temperature stability of the device is high; and the device is suitable for different electric field measurement environments.

Description

technical field [0001] The invention relates to the field of electric field sensing, in particular to a high-sensitivity, low-cost, small-volume capacitive-cantilever beam micro electric field sensing device based on piezoelectric effect for space electric field measurement. Background technique [0002] The ubiquitous energy Internet of Things is an important development direction of the current energy and information industry. On the basis of the Energy Internet, the Ubiquitous Energy Internet of Things uses wireless sensing, intelligent control and other technologies to build a new type of energy information interaction network to achieve the optimization of energy economy. Sensor networks are an important part of the ubiquitous energy Internet of Things. Through the real-time collection and monitoring of data in the energy Internet of Things, sensors can provide a large amount of data, and by learning and analyzing the data, an information network supporting the ubiquit...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B81B3/00G01R29/08
CPCB81B3/0021B81B3/0037G01R29/0878B81B2203/0118B81B2201/0221
Inventor 何金良胡军韩志飞薛芬余占清曾嵘张波李琦庄池杰
Owner TSINGHUA UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap