Capacitance-cantilever beam miniature electric field measurement sensing device based on inverse piezoelectric effect

Abstract

A capacitance-cantilever beam micro electric field measurement sensing device based on an inverse piezoelectric effect comprises a substrate, and the substrate can be made of glass, silicon and othermaterials. The substrate is fixedly connected with one end of a semiconductor film. The semiconductor film covers the substrate. An upper electrode and a piezoelectric layer are arranged on the top surface of the semiconductor film. A rectangular cavity is formed in the middle of the top surface of the substrate. A lower electrode is arranged in the cavity. A gap of a C-shaped structure is formedin the piezoelectric layer along the edge of the cavity. The cavity is communicated with the outside through the gap. The device has the advantages that the sensitivity of the device is improved; themeasurement sensitivity and the response linearity can be improved; the structure is compatible with a micromachining mode; industrial mass production can be conducted; the temperature stability of the device is high; and the device is suitable for different electric field measurement environments.

Description

technical field [0001] The invention relates to the field of electric field sensing, in particular to a high-sensitivity, low-cost, small-volume capacitive-cantilever beam micro electric field sensing device based on piezoelectric effect for space electric field measurement. Background technique [0002] The ubiquitous energy Internet of Things is an important development direction of the current energy and information industry. On the basis of the Energy Internet, the Ubiquitous Energy Internet of Things uses wireless sensing, intelligent control and other technologies to build a new type of energy information interaction network to achieve the optimization of energy economy. Sensor networks are an important part of the ubiquitous energy Internet of Things. Through the real-time collection and monitoring of data in the energy Internet of Things, sensors can provide a large amount of data, and by learning and analyzing the data, an information network supporting the ubiquit...

AI Technical Summary

Problems solved by technology

Among them, the equipment cost of the optical electric field sensor is very high, the laser source and the laser measurement device occupy a large volume, and the temperature stability is poor

Electric field sensors based on microelectromechanical systems have the advantage of miniaturization, but such sensors generally have high power consumption and low measurement electric field

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