New device and method for simultaneous quasi-aplanatic imaging confocal detection of adjacent surfaces of semiconductor crystal grains

Abstract

The invention discloses a new method for simultaneous quasi-aplanatic imaging confocal detection of adjacent surfaces of semiconductor crystal grains. A detection device comprises a camera, a telecentric imaging lens, a semi-transparent and semi-reflective image combiner, the semiconductor crystal grains and a transparent object stage for bearing the semiconductor crystal grains which are sequentially arranged in a direction of a light path; a first right-angle transferring prism and a second right-angle transferring prism are respectively arranged on the light path between the semiconductor crystal grains and the semi-transparent and semi-reflective image combiner, the second right-angle transferring prism is positioned at a first side part of the optical axis of the telecentric imaging lens, the two right-angle surfaces of the two right-angle transferring prisms are respectively vertical to the light path, at least two surfaces of the semiconductor crystal grains are respectively imaged at different area positions on a sensor surface of the camera through the right-angle transferring prisms and the semi-transparent and semi-reflective image combiner by double light paths, and thedistance delta between the double images of the adjacent surfaces is adjustable.

Description

Technical field: [0001] The invention belongs to the fields of optical detection and machine vision, and in particular relates to a new device and method for simultaneous quasi-equal optical path confocal imaging detection of adjacent surfaces of semiconductor crystal grains. Background technique: [0002] In the application of machine vision imaging inspection, when the object to be inspected is large, a telecentric imaging lens with a suitable field of view is usually selected at one station to inspect one surface of the object; when the object to be inspected is small (such as semiconductor optoelectronic components) , in order to improve the detection speed and make full use of the effective field of view of the telecentric imaging lens, a technical solution of simultaneously detecting two surfaces of the object with one telecentric imaging lens on one station is adopted. [0003] The main technical problems to be solved by the device and method for simultaneous defect d...

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Problems solved by technology

[0008] In the scheme proposed by the applicant in previous patent applications (patent application numbers 201910207016.2, 201911247575.2), since the optical path difference △ of double-sided simultaneous imaging detection is related to the structural parameters (L1, L2), when the structural parameters are large, the method Inevitably there are certain limitations in use; the above two applications use a larger right-angle transfer prism and a large depth-of-field telecentric imaging lens to solve the resolution problems caused by simultaneous detection of adjacent surfaces and their optical path diffe

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