Runner system with high-temperature desorption and method thereof

Abstract

The invention discloses a runner system with high-temperature desorption and a method thereof. When the adsorption rotating wheel is mainly used for carrying out on-line operation (ON LINE), high-temperature desorption can be carried out, and residual high-boiling-point organic matters (VOC) can be removed, so that the adsorption capacity of the adsorption rotating wheel can be recovered, the treatment efficiency of volatile organic waste gas is improved, and the effect of reducing pollutant emission is achieved.

Description

technical field [0001] The invention relates to a high-temperature desorption wheel system and method thereof, in particular to a system and method capable of increasing the efficiency of organic waste gas treatment and suitable for waste gas treatment of factories in semiconductor industry, photoelectric industry or chemical related industries. Background technique [0002] At present, volatile organic gases (VOC) are produced in the manufacturing process of the semiconductor industry or the optoelectronic industry. Therefore, processing equipment for processing volatile organic gases (VOC) will be installed in each factory area to avoid volatile organic gases ( VOC) are directly discharged into the air and cause air pollution. [0003] However, most of the treatment equipment installed in the factory area to deal with volatile organic gases (VOC) currently adopts the adsorption rotor method to adsorb volatile organic gases (VOC), but after a period of use, there are often ...

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Problems solved by technology

[0003] However, most of the treatment equipment installed in the factory area to deal with volatile organic gases (VOC) currently adopts the adsorption rotor method to adsorb volatile organic gases (VOC), but after a period of use, there are often high-boiling point substances that are not easy to desorb and remain On the adsorption wheel, it directly affects the adsorption performance of the adsorption wheel. Therefore, the current treatment method is to entrust external professional manufacturers to regularly clean the adsorption wheel to ensure the operation efficiency and air flow of the adsorption wheel.

[0004] However, when the above-mentioned regular cleaning of the adsorption runners is carried out, a large amount of clear water is required for cleaning, and therefore a large amount of waste water containing volatile organic gases (VOC) is produced, and at this time, the waste water containing volatile organic gases (VOC) The chemical oxygen demand (COD) in the waste water is very high, and it cannot be directly discharged after being treated by the wastewater treatment system in the factory. It is necessary to entrust a professional and qualified waste removal company to handle it.

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