Method for preparing high-hardness anti-friction and anti-corrosion ticxoy coating by using carbon dioxide
A technology of carbon dioxide and coating, which is applied in the direction of coating, metal material coating process, vacuum evaporation plating, etc., to achieve high hardness, excellent corrosion resistance, and reduce friction
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Embodiment 1
[0020] Example 1 The method of preparing high-hard anti-friction and anti-corrosion TiCxOy coating by using carbon dioxide:
[0021] Clean the polished monocrystalline silicon (100) with acetone, absolute ethanol, and distilled water in sequence for 15 minutes to remove oil stains on the surface, and then use N 2 Blow dry to obtain a dry sample.
[0022] The dried sample was transferred to a vacuum chamber and evacuated to 9.8 × 10 -4 After Pa, Ar gas ion bombardment was carried out with pulse negative bias voltage under the conditions of chamber pressure of 5.0Pa, pulse negative bias strength of -1000V, duty cycle of 60%, and frequency of 60KHz for 30 min.
[0023] Refill with 50 sccm of argon and 10 sccm of CO 2 , under the mixed atmosphere of argon and carbon dioxide gas, the Ti target was deposited by DC pulsed magnetron sputtering. The deposition conditions of DC pulsed magnetron sputtering are that the air pressure is 1.0Pa, the pulse bias voltage is -100V, the pulse...
Embodiment 2
[0025] Example 2 The method of preparing high-hard anti-friction and anti-corrosion TiCxOy coating by using carbon dioxide:
[0026] Clean the polished stainless steel with acetone, absolute ethanol, and distilled water for 5 minutes in order to remove the oil on the surface, and then use N 2 Blow dry to obtain a dry sample.
[0027] The dried sample was transferred to a vacuum chamber and evacuated to 9.8 × 10 -4 After Pa, Ar gas ion bombardment was carried out with pulse negative bias voltage under the conditions of chamber pressure of 5.0Pa, pulse negative bias strength of -1000V, duty cycle of 60%, and frequency of 60KHz for 30min.
[0028] Refill with 50 sccm of argon and 10 sccm of CO 2 , under the mixed atmosphere of argon and carbon dioxide gas, the Ti target was deposited by DC pulsed magnetron sputtering. The deposition conditions of DC pulsed magnetron sputtering are that the air pressure is 1.0Pa, the pulse bias voltage is -100V, the pulse duty ratio is 60%, th...
Embodiment 3
[0030] Example 3 The method of preparing high-hard anti-friction and anti-corrosion TiCxOy coating by using carbon dioxide:
[0031] Clean the polished bearing steel sequentially with acetone, absolute ethanol and distilled water for 10 minutes to remove the oil on the surface, and then use N 2 Blow dry to obtain a dry sample.
[0032] The dried sample was transferred to a vacuum chamber and evacuated to 9.8 × 10 -4 After Pa, Ar gas ion bombardment was carried out with pulse negative bias voltage under the conditions of chamber pressure of 5.0Pa, pulse negative bias strength of -1000V, duty cycle of 60%, and frequency of 60KHz for 30min.
[0033] Refill with 50 sccm of argon and 10 sccm of CO 2 , under the mixed atmosphere of argon and carbon dioxide gas, the Ti target was deposited by DC pulsed magnetron sputtering. The deposition conditions of DC pulsed magnetron sputtering are that the air pressure is 1.0Pa, the pulse bias voltage is -100V, the pulse duty ratio is 60%, ...
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