A graphite boat for horizontal liquid phase epitaxy
A technology of epitaxial growth and leveling liquid, applied in the field of graphite boat, can solve the problems of inconvenient operation, fracture of quartz tie rod, damage of internal control thermocouple, etc., to reduce the risk of damage, avoid repeated operation, and be convenient to use.
Active Publication Date: 2022-03-29
48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP
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Problems solved by technology
During the production process, the graphite boat needs to be loaded and unloaded frequently. During the loading and unloading process of the graphite boat, the internal control thermocouple and the tie rod need to be manually taken out, which is inconvenient to operate, and it is easy to cause damage to the internal control thermocouple and the breakage of the quartz tie rod.
Method used
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[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0019] Figure 1 to Figure 3 An embodiment of the graphite boat used for horizontal liquid phase epitaxial growth of the present invention is shown. The graphite boat used for horizontal liquid phase epitaxial growth of this embodiment includes a boat base 1 and a boat slide arranged in the boat base 1. Block 2, and the boat cover plate 3 that links to each other with boat base 1, the bottom of boat base 1 is provided with pick-and-place portion 11 for manipulator 5 to pick and place on left and right sides, is provided with support portion 12 between two pick-and-place portions 11, supports There is a boat supporting plate 4 under the part 12, a lower groove 41 is arranged on the top of the boat supporting plate 4, an upper groove 13 is arranged at the bottom of the supporting part 12, and the lower groove 41 cooperates with the uppe...
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The invention discloses a graphite boat for horizontal liquid phase epitaxial growth, which comprises a boat base, a boat slider arranged in the boat base, and a boat cover connected to the boat base, the bottom of the boat base is on the left and right sides There is a pick-and-place part for the manipulator to pick and place, a support part is provided between the two pick-and-place parts, a boat support is provided under the support, and a lower groove is provided on the top of the support. There is an upper groove on the bottom of the part, and the lower groove cooperates with the upper groove to form a hole for placing the internal control thermal coupler. The invention has the advantages of simple structure, convenient use, avoiding repeated operations on the pull rod and the internal control thermocouple, and reducing the risk of damage to the internal control thermocouple and the pull rod.
Description
technical field [0001] The invention relates to horizontal liquid phase epitaxy equipment, in particular to a graphite boat used for horizontal liquid phase epitaxy growth. Background technique [0002] HgCdTe epitaxial thin film material is the key material for the preparation of infrared focal plane devices, and has an important application background in many fields. Liquid phase epitaxial growth technology is the most mature growth technology of mercury cadmium telluride film. In the horizontal liquid phase epitaxy equipment, the graphite boat is used to provide the growth place of the epitaxial wafer, which is the core of the liquid phase epitaxy. The currently used graphite boat usually needs to be provided with through holes for arranging internal control thermocouples to test the temperature of the graphite boat and the installation structure of the quartz rod so that the graphite boat enters and exits the process equipment with the quartz rod. During the production...
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IPC IPC(8): C30B19/06
CPCC30B19/06
Inventor 邸拴虎袁卫华魏唯罗才旺罗臻
Owner 48TH RES INST OF CHINA ELECTRONICS TECH GROUP CORP