Moth-eye-structure-imitated vanadium dioxide intelligent window film and preparation method thereof

An intelligent and thin film technology of vanadium dioxide, applied in the field of smart windows, can solve the problems of insufficient thermal regulation ability to meet the needs of use, restricting the application in the field of smart windows, and low visible transmission of thin films at low temperature, so as to broaden the scope of application and improve the practicality. the effect of reducing the preparation temperature

Active Publication Date: 2020-05-12
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The present invention will solve existing VO 2 The low-temperature visible transmission of the film is relatively low, the thermal regulation ability is not enough to meet the needs of use, and the phase transition temperature is high, which seriously restricts its application in the field of smart windows. To provide a vanadium dioxide smart window film with a moth-eye structure and its preparation method

Method used

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  • Moth-eye-structure-imitated vanadium dioxide intelligent window film and preparation method thereof
  • Moth-eye-structure-imitated vanadium dioxide intelligent window film and preparation method thereof

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specific Embodiment approach 1

[0021] Specific implementation mode one: combine figure 1 Describe this embodiment in detail. In this embodiment, a vanadium dioxide smart window film with imitation moth-eye structure consists of a base layer and a VO2 film from bottom to top. 2 layer composition;

[0022] The VO 2 layer consists of multiple W-doped VO 2 Composed of micro-nano structural units, and the multiple W-doped VO 2 The micro-nano structural units are evenly distributed on the surface of the upper layer of the base layer, adjacent to the W-doped VO 2 The micro-nano structural units are closely arranged; the W-doped VO 2 The shape of the micro-nano structural unit is conical, cylindrical or truncated; when the W-doped VO 2 When the shape of the micro-nano structural unit is conical, the diameter of the conical bottom surface is 50nm-500nm, and the height is 20nm-300nm; when the W-doped VO 2 When the shape of the micro-nano structural unit is cylindrical, the diameter of the cylindrical shape is 5...

specific Embodiment approach 2

[0028] Specific embodiment two: the difference between this embodiment and specific embodiment one is: the base layer is SiO 2 、TiO 2 or polyimide. Others are the same as in the first embodiment.

specific Embodiment approach 3

[0029] Specific Embodiment 3: The difference between this embodiment and Specific Embodiment 1 or 2 is that the VO 2 The thickness of the layer is 20nm-300nm; the thickness of the base layer is 500μm-1000μm. Others are the same as those in the first or second embodiment.

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Abstract

The invention discloses a moth-eye-structure-imitated vanadium dioxide intelligent window film and a preparation method thereof, and belongs to the field of intelligent windows. The problems that an existing VO2 film is low in low-temperature visible transmittance, the heat regulation and control capacity cannot meet the use requirement, the phase change temperature is high, and application of theexisting VO2 film in the field of intelligent windows is seriously restricted are solved. The moth-eye-structure-imitated vanadium dioxide intelligent window film is sequentially composed of a substrate layer and a VO2 layer from bottom to top. The preparation method comprises the following steps of 1, preparing a W-doped VO2 film through high-energy pulse magnetron sputtering; and 2, ion beam etching. The preparation method is used for the moth-eye-structure-imitated VO2 intelligent window thin film and the preparation thereof.

Description

technical field [0001] The invention belongs to the field of intelligent windows. Background technique [0002] VO 2 It is a thermochromic material with high transmittance in low-temperature visible and near-infrared bands and high reflection in high-temperature visible and near-infrared bands. It is very suitable as a smart window material. Smart window materials have three main parameters: visible transmittance, thermal control capability, and phase transition temperature, which represent lighting capability, energy-saving capability, and practicability, respectively. [0003] However, the intrinsic VO 2 Low-temperature visible transmittance of thin films is relatively low, generally 40%, and thermal regulation ability is generally less than 10%, which is not enough to meet the needs of use, and the phase transition temperature is high, which seriously restricts its application in the field of smart windows. Long Yi, Nanyang Technological University, etc. People used th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/58C03C17/245G02B5/00G02B1/113
CPCC23C14/35C23C14/3485C23C14/0688C23C14/5833C23C14/5873C03C17/002C03C17/245G02B5/008G02B1/113C03C2217/70C03C2218/156C03C2218/33
Inventor 李垚豆书亮魏航赵九蓬任飞飞谷金鑫李龙范青潽
Owner HARBIN INST OF TECH
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