Micro-angle detection device and method based on autocollimator

Abstract

The invention discloses a micro-angle detection device based on an autocollimator. The device comprises a light source assembly, an autocollimator connected with the light source assembly, a reflecting mirror corresponding to the autocollimator, a detector arranged in the autocollimator, a wedge-shaped mirror assembly arranged on the autocollimator, and a computer control system connected with theautocollimator, wherein the light source assembly is used for lightening a collimator reticle and providing a test light beam, the wedge-shaped assembly comprises a wedge-shaped mirror and a connecting piece, the wedge-shaped mirror is installed on the autocollimator through the connecting piece, the detector is used for detecting an offset distance of a light beam focus, and the computer controlsystem performs data acquisition and calculation. The device is advantaged in that polarization performance of the wedge-shaped mirror is mainly adopted, light emitted by the autocollimator is divided into two beams of parallel light with different angles in a half-caliber mode, and the autocollimator is simple in structure, convenient to use and high in accuracy.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a micro-angle detection device and method based on an autocollimator. Background technique [0002] Humans have researched and explored micro-deformation measurement technology a long time ago. Especially in the 18th century, humans began to conduct a lot of research on micro-deformation. Muss-chenbrock adopts the method of gear mechanism, and through the horizontal test of about 15cm The device was enlarged to measure the tiny expansion caused by the heating of several candles, realizing the earliest measurement of thermal expansion of materials. In 1805, Lavosier and Laplace used the optical lever magnification technology to measure the deformation of the Muss-chenbrock measuring device. Compared with the previous measurement technology, the measurement accuracy was improved. In 1927, Becker continued to study X-ray technology and finally applied it to the measurement of therm...

AI Technical Summary

Problems solved by technology

[0005] At present, when the multi-target autocollimator performs small angle detection, due to the limitation of the resolution of the autocollimator itself, it is impossible to perform angle detection on two surfaces with small angle deviations.

[0006] In order to solve the imaging overlap problem when the multi-objective autocollimator detects small angles, the present invention provides a small-angle detection method based on the multi-objective autocollimator plus wedge angle sheet for optical path beam splitting

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