A micro-angle detection device and method based on an autocollimator

Abstract

The invention discloses a micro-angle detection device based on an autocollimator, comprising: a light source component, an autocollimator connected to the light source component, a reflector corresponding to the autocollimator, a A detector inside the collimator, a wedge mirror assembly arranged on the autocollimator, and a computer control system connected with the autocollimator; wherein the light source assembly is used to light up the collimator components Scribe and provide a test beam; the wedge assembly includes a wedge mirror and a connecting piece, the wedge mirror is mounted on the autocollimator through the connecting piece; the detector is used to detect the offset distance of the beam focus; the computer controls The system collects and calculates data. The invention mainly adopts the polarization performance of the wedge-shaped mirror, and divides the light emitted from the autocollimator into two parallel beams of different angles by means of a half-aperture, and has a simple structure, convenient use and high precision.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a micro-angle detection device and method based on an autocollimator. Background technique [0002] Humans have researched and explored micro-deformation measurement technology for a long time, especially in the 18th century, humans began to conduct a lot of research on micro-deformation, Muss-chenbrock adopted the method of gear mechanism, through the test of about 15cm placed horizontally. The first measurement of the thermal expansion of the material was achieved by zooming in on the piece and measuring the tiny expansion caused by the heating of several candles. In 1805, Lavosier and Laplace used the optical lever magnification technology to measure the deformation of the measuring device of Muss-chenbrock, which improved the measurement accuracy compared with the previous measurement technology. In 1927, Becker continued to study the X-ray technique and finally applied it t...

AI Technical Summary

Problems solved by technology

[0005] At present, when the multi-target autocollimator performs small angle detection, due to the limitation of the resolution of the autocollimator itself, it is impossible to perform angle detection on two surfaces with small angle deviations.

[0006] In order to solve the imaging overlap problem when the multi-objective autocollimator detects small angles, the present invention provides a small-angle detection method based on the multi-objective autocollimator plus wedge angle sheet for optical path beam splitting

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