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A kind of preparation method of array type porous oxide thin film

A porous oxide, array-type technology, applied to the surface coating liquid device, pre-treated surface, coating, etc., can solve the problems of poor repeatability, difficulty in large-scale popularization, difficulty in ensuring product uniformity, etc.

Active Publication Date: 2022-05-20
WUYI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The existing methods for preparing arrayed oxide porous films have poor reproducibility, and it is difficult to guarantee the uniformity of the product
Although the stability and repeatability of the process can be improved through high-precision control devices and lifting devices, however, such devices are expensive and difficult to popularize on a large scale

Method used

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  • A kind of preparation method of array type porous oxide thin film
  • A kind of preparation method of array type porous oxide thin film
  • A kind of preparation method of array type porous oxide thin film

Examples

Experimental program
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Embodiment 1

[0038] This example provides a method for preparing an arrayed porous oxide thin film, the steps comprising:

[0039] S1: placing the substrate at the bottom of the filter basket 10, and then immersing the filter basket 10 in the precursor solution 50;

[0040] S2: drop the microsphere solution onto the surface of the precursor solution 50;

[0041] S3: lift the filter basket 10 up to the bottom of the filter basket 10 to leave the precursor solution, take out the substrate 30 and heat to obtain the precursor film;

[0042] S4: heating the precursor thin film and then sintering to obtain the arrayed porous oxide thin film;

[0043] like figure 1 As shown, the filter basket 10 has a bottom plate 110 and a side wall 120 formed around the bottom plate 110. Filter holes (not shown in the figure) are distributed on the bottom plate 110. The included angle is 120°.

[0044] like figure 2 As shown, as the filter basket is lifted, the microspheres originally suspended on the sur...

Embodiment 2

[0060] This example provides a method for preparing an arrayed porous oxide film. The difference between this example and Example 1 is that in this example, the side wall 120 of the filter basket 10 and the bottom plate 110 form a right angle. like Figure 4 shown.

[0061] When the angle between the side wall 120 of the filter basket 10 and the bottom plate 110 is greater than 90°, the liquid surface area S1 of the precursor solution 50 in the filter basket 10 will gradually decrease with the lifting of the filter basket, which is more conducive to gathering and suspending the liquid. The microspheres 40 make the microspheres 40 form a regular and dense arrangement. When the angle between the side wall 120 of the filter basket 10 and the bottom plate 110 is 90°, the liquid surface area S1 of the precursor solution 50 in the filter basket 10 will remain constant as the filter basket is raised.

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Abstract

The embodiment of the present invention provides a method for preparing an arrayed porous oxide film. In the method, the substrate is first placed at the bottom of the filter basket, and then the filter basket is immersed in the precursor solution, and the microsphere solution is dripped on the surface of the precursor solution. , and then lift the filter basket up to the bottom of the filter basket to leave the precursor solution, take out the substrate and heat it to obtain a precursor film, heat up the precursor film and sinter it to obtain the arrayed porous oxide film. By replacing the microspheres in the microsphere solution, the preparation method can realize the adjustment of the pore size on the oxide film by using microspheres of different particle sizes, which is suitable for single metal oxide porous films and multi-element metal oxide The porous film has a wide application range, can be prepared without expensive equipment and precise control, has a simple process and low production cost.

Description

technical field [0001] The invention belongs to the technical field of oxide thin film preparation, and in particular relates to a preparation method of an arrayed porous oxide thin film. Background technique [0002] Arrayed oxide porous films have the advantages of large specific surface area, stable chemical properties, and excellent optoelectronic properties, and can be widely used in photocatalysis, photodetectors, gas sensors, and biosensors. [0003] One of the common methods for preparing arrayed oxide porous films is to use polystyrene (abbreviated as PS) microspheres. In the prior art, the first method is to spread the PS microspheres evenly on the substrate, then immerse the substrate in the precursor solution, then pull the solution, and use the capillary force between the PS microspheres and the substrate. A thin layer of precursor solution is adsorbed between them, and then high-temperature annealing is performed to remove PS microspheres, and the precursor so...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05D1/18B05D1/22B05D3/02B05D7/14B05D7/24
CPCB05D1/18B05D1/22B05D3/0254B05D7/24B05D7/14B05D2203/30
Inventor 杨为家王凤鸣贺鹏宇何鑫王忆
Owner WUYI UNIV
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