Defect detection method and defect detection system
A defect detection and defect technology, applied in optical testing of defects/defects, measurement devices, material analysis by optical means, etc. The effect of reducing the number, reducing the time of scanning, increasing the capture capacity
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Embodiment 1
[0066] see figure 1 , the present invention provides a defect detection method, the defect detection method comprises the following steps:
[0067] 1) Use short-wavelength light and long-wavelength light to perform alternate pulse scanning on each area of the wafer to be inspected;
[0068] 2) receiving a short-wave reflected light signal that reflects the short-wave light and a long-wave reflected light signal that reflects the long-wave light by the wafer to be detected;
[0069] 3) removing the short-wave reflected light signal and the long-wave reflected light signal outside the preset intensity range, and removing all light signals reflected from the same area of the wafer to be inspected and within the preset intensity range The intensity of the short-wave reflected light signal and the long-wave reflected light signal is smaller;
[0070] 4) forming a defect pattern according to the retained short-wave reflected light signal and the retained long-wave reflected li...
Embodiment 2
[0089] see figure 2 and image 3 The present invention also provides a defect detection system, which includes: a light source device 10, a detection device 12, a comparison processing device 13, and an imaging detection device 14; wherein, the light source device 10 is located on the wafer 11 to be detected above, the light source device 10 includes a short-wave light source 101 and a long-wave light source 102, and the light source device 10 is used to alternately emit short-wave light and long-wave light to perform alternate pulse scanning on each area of the wafer 11 to be inspected, that is The short-wave light source 101 and the long-wave light source 102 alternately emit corresponding light; the detection device 12 is located on the upper side of the wafer 11 to be inspected, and the detection device 12 is used to receive the wafer 11 to be inspected The short-wave reflected light signal that reflects the short-wave light and the long-wave reflected light signal tha...
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