The invention discloses a
reaction tube installation auxiliary device for
semiconductor wafer manufacturing and an auxiliary method thereof, relates to the technical field of
semiconductor manufacturing, and aims to solve the problems that when an existing
reaction tube is installed, the size is large, the installation difficulty is high, time and labor are consumed in user operation, and installation is inconvenient. Comprising a moving trolley platform, a plurality of universal wheels are arranged below the moving trolley platform, the moving trolley platform comprises a high platform and a low platform, assembling clamping pieces are arranged on the inner walls of the two sides of the low platform, a containing groove is formed in the outer wall of the high platform, and a
reaction tube assembly is placed in the containing groove; the front end and the rear end of the reaction tube
assembly are each provided with a clamping adjusting piece used for limiting and clamping, a displacement
assembly is arranged below the clamping adjusting pieces, a driving assembly is arranged at one end of the displacement assembly, and a
diffusion equipment assembling piece used for being assembled with the reaction tube assembly in a combined mode is arranged above the low table. And a lifting assembly is arranged at one end of the
diffusion equipment assembly part.