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A mems flow sensor chip

A flow sensor and chip technology, applied in the measurement of flow/mass flow, liquid/fluid solid measurement, instruments, etc., can solve the problems of high technical difficulty, high production cost, short service life, etc., to optimize the arrangement structure, cost Low, long service life effect

Active Publication Date: 2021-07-13
SUZHOU IN SITU CHIP TECH CO LTD
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  • Abstract
  • Description
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  • Application Information

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Problems solved by technology

[0003] However, because the MEMS flow sensor chip involves multidisciplinary fields, the technology is difficult and the processing requirements are high, and a flow sensor is often only suitable for a specific environment, resulting in high production costs
[0004] In addition, most MEMS flow sensor chips are limited by the production process and use ordinary semiconductor materials, so the service life is generally short

Method used

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Embodiment Construction

[0022] The present invention will be further described in detail below through specific embodiments in conjunction with the accompanying drawings. The present application can be implemented in many different forms, and is not limited to the implementation described in this embodiment. The following specific embodiments are provided for the purpose of facilitating a clearer and more thorough understanding of the disclosure of the present application, wherein words indicating orientation, such as up, down, left and right, are only for the positions of the illustrated structures in the corresponding drawings.

[0023] refer to Figure 1 to Figure 4 , the present invention provides a MEMS flow sensor chip, the MEMS flow sensor chip includes a substrate 1 having a cavity 9, a cavity protection layer 2 arranged under the substrate 1, and a resistance element support layer 3 stacked above the substrate 1. , the temperature sensing element 4 and the current measuring element 5 placed...

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Abstract

The invention provides a MEMS flow sensor chip. The MEMS flow sensor chip includes a substrate with a cavity, a cavity protection layer arranged under the substrate, a resistive element support layer stacked above the substrate, and a resistive element mounted on the substrate. The temperature-sensing element and the current-measuring element of the support layer, the resistance element protection layer covering the temperature-sensing element and the flow-measurement element, and the chip protection layer arranged above the resistance element protection layer. Wherein, the flow-measuring element is correspondingly disposed directly above the cavity; the temperature-sensing element is disposed above the base at a position not corresponding to the cavity. The MEMS flow sensor chip of the present invention is widely used, and is especially suitable for the measurement of fluid flow velocity of small and micro flow; it has the characteristics of simple circuit structure, high measurement accuracy and low cost; the measurement sensitivity and measurement range are improved; and the service life is longer.

Description

technical field [0001] The invention is a fluid flow sensor chip based on MEMS technology, in particular to a MEMS flow sensor chip of micro-flow or small-flow fluid. Background technique [0002] MEMS flow sensor chip is based on microelectronics technology (semiconductor manufacturing technology), combined with micromachining and precision machining and other technologies to manufacture the core device of the flow sensor. At present, sensor chips based on MEMS technology have been widely used in industrial control, automotive electronics, medical equipment, analytical instruments, air quality detection and other fields. Compared with traditional mechanical flow meters, MEMS flow sensor chips have the characteristics of small size, light weight, low power consumption, high reliability, easy integration and realization of intelligence. [0003] However, because the MEMS flow sensor chip involves multiple disciplines, the technology is difficult, the processing requirements ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01F1/684
CPCG01F1/6845
Inventor 宋阳阳温赛赛马硕胡慧珊王新亮
Owner SUZHOU IN SITU CHIP TECH CO LTD
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