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Object shape measuring system and method and storage medium

A technology of object shape and measurement system, applied in the field of measurement, can solve the problems of maintenance cost and easy failure, and achieve the effect of simple structure and low failure rate

Active Publication Date: 2020-06-05
GUANGZHOU UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These methods all require mechanical movement, which is called mechanical scanning, which has certain complexity and is prone to failure, resulting in maintenance costs.

Method used

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  • Object shape measuring system and method and storage medium
  • Object shape measuring system and method and storage medium
  • Object shape measuring system and method and storage medium

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] The measurement system in this embodiment is composed of two parts, the first interference device and the second interference device. Wherein the first interference device has a light-emitting component inside, after the light-emitting component emits light, based on the interference effect, the spectrum of the light emitted by the first interference device has a certain period, and by configuring the first interference device, its spectrum period can be adjusted. That is to say, the first interferometric device as a whole can serve as the light source on which the second interferometric device works.

[0045] The second interference device uses the first interference device as a light source, receives the light emitted by the first interference device, and causes interference phenomenon to occur through the internal structure. There are multiple specific planes in the spatial region where the interference phenomenon occurs, which is equivalent to the reference plane in...

Embodiment 2

[0073] On the basis of the measurement system described in Embodiment 1, write the corresponding computer code and write it into the controller, cooperate with automatic control technologies such as mechanical arms, and computer technologies such as image analysis, so that the measurement system can automatically perform at least one of the following step:

[0074] S1. Obtaining light with a variable periodic spectrum from the first interference device;

[0075] S2. Splitting the light beams to form a first light beam and a second light beam;

[0076] S3. Reflecting the first light beam on the original path, so that multiple chirp signals are formed on the optical path of the second light beam; wherein the plane where the chirp signal is located in the center is the main reference plane, and the plane where the other chirp signals are located is secondary reference plane;

[0077] S4. placing the measured object on the optical path of the second light beam;

[0078] S5. Adj...

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Abstract

The invention discloses an object shape measuring system and method and a storage medium. The system comprises a first interference device and a second interference device, wherein the first interference device is used for providing a light source with a variable period spectrum, and the second interference device is used for receiving the light source provided by the first interference device, sothat the light source generates an interference effect to form a main reference plane and a secondary reference plane, and the position of the main reference plane or the secondary reference plane isimaged. According to the invention, a measured object is placed near the secondary reference plane, when the spectral period of the light emitted by the first interference device changes, the relative position between the secondary reference plane and the primary reference plane correspondingly changes, equivalently, the surface of the measured object is scanned without depending on mechanical movement, and the device has the advantages of being simple in structure, low in failure rate, easy to maintain, low in use cost and the like. The method is widely applied to the technical field of measurement.

Description

technical field [0001] The invention relates to the field of measurement technology, in particular to an object shape measurement system, method and storage medium. Background technique [0002] White light interferometry (WLI) is a method used to precisely measure the shape of objects. figure 1 Shown is the device and principle used in white light interferometry, mainly including light source, beam splitting device, reference mirror and imaging device, forming a structure similar to Michael interferometer, but one less mirror than conventional Michael interferometer , and place the object to be measured at the position where the missing mirror is. The beam splitting device can divide the light emitted by the light source into two beams, one beam goes to the reference mirror and is reflected back, and the other beam goes to the surface of the measured object and is reflected back, these rays will interfere and be captured by the imaging device to the corresponding interfer...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00G01B11/24
CPCG01B11/002G01B11/2441
Inventor 蔡长青
Owner GUANGZHOU UNIVERSITY