VCSEL device with transparent top lining, back positive electrode and back negative electrode, and preparation method thereof

A positive and negative electrode, backside technology, applied in the field of VCSEL devices and their preparation, can solve the problems of increasing inductance, the effect of light extraction efficiency, and the need for wire bonding.

Pending Publication Date: 2020-06-05
VERTILITE CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This preparation process has the following problems: First, it needs to carry out two substrate bonding processes, the process is complicated and the surface quality is difficult to control
The backside light emission method is adopted, and the backside substrate material has restrictions on the laser wavelength. For example, the GaAs substrate is not s

Method used

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  • VCSEL device with transparent top lining, back positive electrode and back negative electrode, and preparation method thereof
  • VCSEL device with transparent top lining, back positive electrode and back negative electrode, and preparation method thereof
  • VCSEL device with transparent top lining, back positive electrode and back negative electrode, and preparation method thereof

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Example Embodiment

[0072] Example 1

[0073] This embodiment provides a VCSEL device with a sapphire transparent top liner and positive and negative electrodes on the back and a preparation method thereof, such as figure 1 As shown, yellow light process, P-type ohmic metal layer 5 evaporation, first passivation layer 4 deposition and etching process are sequentially performed on the front side of the epitaxial layer to etch through the quantum well layer 2, and part of the N-type DBR layer 3 is etched to form trenches. The trench 22, the mesa structure of the VCSEL unit and the corresponding light-emitting area are then subjected to an oxidation process to form an oxide layer 19, and the material of the P-type ohmic metal layer is Ti.

[0074] Such as figure 2 As shown, a second passivation layer 9 is deposited on the first passivation layer 4, and the second passivation layer 9 is etched to expose the P-type ohmic metal layer 5.

[0075] Such as image 3 As shown, a front seed metal layer 10 and an e...

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Abstract

The invention provides a VCSEL device with a transparent top lining, a back positive electrode and a back negative electrode and a preparation method of the VCSEL device. The VCSEL device comprises: an oxidation channel on an epitaxial layer, a VCSEL unit mesa structure defined by the oxidation channel, a transparent top lining positioned on the epitaxial layer, an optical element arranged on thetransparent top lining, and a through hole formed in the back surface of the epitaxial layer; and the back surface of the epitaxial layer comprises a positive electrode and a negative electrode. According to the invention, the main manufacturing process can be completed by bonding the top substrate on the front surface once and then removing the back surface substrate; according to the device, therequirement on the accuracy of back photoetching in the front side and the manufacturing process of emergent light is relatively low; and the positive electrode and the negative electrode are locatedon the back face, routing is not needed during packaging, surface mounting is conducted directly, and direct attachment to other components such as drivers is facilitated.

Description

technical field [0001] The invention relates to the technical field of vertical cavity surface emitting lasers (VCSEL), in particular to a VCSEL device with a transparent top lining and positive and negative electrodes on the back and a preparation method thereof. Background technique [0002] At present, in many smart devices such as smart phones, there is a huge market demand for flat-top infrared illumination (IR) projection modules. This module plays a vital role in specific applications such as TOF measurement and security camera equipment. The vertical cavity The Surface Emitting Laser (VCSEL) is the core device in the flat-top infrared lighting projection module. [0003] Existing VCSEL devices generally use the back side to emit light, and the positive and negative electrodes are located on the front side. During the device manufacturing process, after the front side is etched, it is usually necessary to bond the top substrate on the front side to protect the front s...

Claims

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Application Information

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IPC IPC(8): H01S5/183H01S5/323H01S5/343
CPCH01S5/183H01S5/18344H01S5/323H01S5/32333H01S5/343
Inventor 梁栋丁维遵翁玮呈刘嵩
Owner VERTILITE CO LTD
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