Tactile sensor, system and interference detection method based on optical waveguide multimode imaging
A tactile sensing system and tactile sensor technology, applied in the direction of converting sensor output, using optical devices to transmit sensing components, instruments, etc., can solve the problems of reducing the reliability of sensors, and achieve dense multi-mode interference patterns, simple structure, and reduced Effect of Dark Area Area
Active Publication Date: 2020-08-04
WESTLAKE UNIV +1
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Problems solved by technology
However, to meet the sensitivity and spatial resolution requirements, current technologies require the use of a large number of optical fibers or complex multiplexing schemes, which reduce the reliability of the sensor
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[0031] The purpose and effects of the present invention will become clearer by describing the present invention in detail according to the accompanying drawings and preferred embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0032] Such as Figure 1~3 As shown, the touch sensor of the present invention includes a substrate 5, and an input optical waveguide 1 and a multimode interference layer 2 arranged on the substrate 5, the refractive index of the multimode interference layer 2 is greater than that of the substrate 5, and the input light The refractive index of the waveguide 1 is equal to that of the multimode interference layer 2; the output end of the input optical waveguide 1 is connected to the incident end of the multimode interference layer 2, and the multimode interference layer 2 is used as a touch sensing layer, and its incident end is partially cov...
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Abstract
The invention discloses a tactile sensor based on optical waveguide multimode imaging. The tactile sensor includes a substrate, an input optical waveguide and a multimode interference layer arranged on the substrate; the refractive index of the multimode interference layer is greater than that of the substrate. rate; the output end of the input optical waveguide is connected to the input end of the multimode interference layer, and the multimode interference layer is used as a tactile sensing layer, and its input end is partially etched to form multiple hollow holes to form a scattering beam expander structure. The tactile sensor of the invention has the advantages of simple structure, low cost, small size, high sensitivity and spatial resolution. And by analyzing the change of the output pattern, distributed sensing at any position on the tactile sensor can be realized.
Description
technical field [0001] The invention relates to the fields of integrated optics, optical waveguide sensing, and image processing, in particular to a tactile sensor, system and interference detection method based on optical waveguide multi-mode imaging. Background technique [0002] Haptic sensing is the measurement of mechanical variables through physical contact between the sensor and the medium being evaluated. In order to provide information on the size and spatial distribution of external stimuli, multiple sensing elements can be arranged in the form of a tactile array, which is widely used in the development of intelligent robots, manipulators for minimally invasive surgery, and human-computer interaction interfaces. Optical waveguide-based tactile sensors have the advantages of small size, anti-electromagnetic interference, light weight, fast response, and easy integration, and have great potential in practical applications. [0003] At present, the main forms of tact...
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IPC IPC(8): G01D5/26G01D3/028
CPCG01D3/028G01D5/266
Inventor 丁振名张紫阳
Owner WESTLAKE UNIV