Hot air circulation oven with tank cover

Abstract

The invention belongs to the technical field of photovoltaic silicon wafer processing, and provides a hot air circulation oven with a tank cover. The hot air circulation oven comprises an oven shell,a silicon wafer positioning device and an air circulation device; a partition plate is arranged in the oven shell to divide the oven shell into a drying cavity and an air channel, the tank cover communicating with the air channel is arranged on the oven shell, a heating device is mounted in the air channel, a plurality of air outlets are formed in the tank cover, and the air outlets are opposite to the drying cavity in position; the silicon wafer positioning device is arranged in the drying cavity of the oven shell and used for clamping and positioning a silicon wafer; and the air circulationdevice is used for enabling hot air to circularly move between the drying cavity and the air channel. The hot air circulation oven has the beneficial effects that the hot air evenly enters the dryingcavity from the air outlets formed in the tank cover, the air outlet direction of the hot air keeps parallel to the plane where the silicon wafer is located, the angle of the silicon wafer can be adjusted according to the airflow angle, and the situation that the silicon wafer is blown into pieces is not prone to being caused.

Description

technical field [0001] The invention relates to the technical field of silicon wafer processing for photovoltaics, in particular to a slot cover hot air circulation oven. Background technique [0002] Monocrystalline silicon is a relatively active non-metallic element, an important part of crystalline materials, and is at the forefront of the development of new materials. Its main uses are as semiconductor materials and the use of solar photovoltaic power generation, heat supply, etc. Because solar energy has many advantages such as cleanliness, environmental protection, and convenience, solar energy utilization technology has made great progress in research and development, commercial production, and market development in the past 30 years, and has become one of the emerging industries with rapid and stable development in the world. [0003] In the drying operation of silicon wafers, because the silicon wafers are brittle and thin, the air in the original hot air circulati...

AI Technical Summary

Problems solved by technology

[0003] In the drying operation of silicon wafers, because the silicon wafers are brittle and thin, the air in the original hot air circulation oven is uneven, so that the wind blowing to the silicon wafers is uneven, and the wind is strong in some places and strong in others. Small, causing some silicon wafers to fail to dry, and some silicon wafers are blown to pieces by the circulating wind

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