Hot air circulation oven with tank cover
A hot air circulation oven, air circulation technology, applied in drying, dryer, lighting and heating equipment and other directions, can solve the problems of uneven air output, uneven silicon wafer air, and silicon wafers are not dry, and achieve fragmentation. The effect of low rate and high drying efficiency
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[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0021] The specific implementation of the present invention will be described in detail below in conjunction with specific embodiments.
[0022] Such as figure 1 As shown, it is a structural diagram of a slot cover hot air circulation oven provided by an embodiment of the present invention, including an oven shell 1, a silicon wafer positioning device 10 and an air circulation device. The oven shell 1 is provided with a partition 4, and the The oven shell 1 is divided into a drying chamber 2 and an air duct 7, the oven shell 1 is provided with a slot cover 3 communicating with the air duct 7, a he...
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