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A control method and system for a MEMS based on a gain strategy

A technology of micro-electronic machinery and control methods, applied in the field of control, can solve problems such as discontinuous controllers, chattering, and complicated controller forms, and achieve simple and effective controller forms, simple control design process, and simple controller forms Effect

Inactive Publication Date: 2021-05-28
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The control problem of microelectromechanical systems has always been concerned, and most of the control methods are based on backstepping design or sliding mode control. It is too complicated to see the form of the controller intuitively; while the controller designed by the sliding film control technology is discontinuous, which will cause chattering phenomenon

Method used

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  • A control method and system for a MEMS based on a gain strategy
  • A control method and system for a MEMS based on a gain strategy
  • A control method and system for a MEMS based on a gain strategy

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Embodiment 1

[0050] See attached Figure 4 As shown, the present embodiment discloses a control method of a MEMS based on a gain strategy. First, according to the internal operation mechanism of the MEMS, a mathematical model is established; a controller with a gain coefficient form is designed for it, Then, with the help of the static gain method, the original system state is transformed to obtain a new system; the Lyapunov function is constructed for the new system, and the derivative of the Lyapunov function is initially scaled by matrix inequality and Yang inequality; determine After analyzing the size of the static gain coefficient, the derivatives of the Lyapunov function are finally sorted out, and finally it is proved that this scheme realizes the design goal that the displacement and acceleration of the MEMS in the X and Y axis directions are asymptotically zero. The control strategy of the invention is simple, the controller is concise, and it is easy to operate and realize.

[00...

Embodiment 2

[0102] The purpose of this embodiment is to provide a computing device, including a memory, a processor, and a computer program stored in the memory and operable on the processor. When the processor executes the program, the following steps are implemented, including:

[0103] According to the internal operation mechanism of the MEMS, the internal relevant information of the system is quantified and processed, and the dynamic model of the MEMS is established;

[0104] Establish a controller to achieve the goal of asymptotically stable control of the system signal;

[0105] Coordinate transformation of the MEMS dynamic model system state to obtain a new system, and bring the established controller into the new system;

[0106] Construct the Lyapunov function based on the new system, derive the Lyapunov function, and determine the size of the static gain coefficient;

[0107] The derivatives of the Lyapunov functions are sorted out, and the controller ensures that the signal of t...

Embodiment 3

[0109] The purpose of this embodiment is to provide a computer-readable storage medium.

[0110] A computer-readable storage medium, on which a computer program is stored, and when the program is executed by a processor, the following steps are performed:

[0111] According to the internal operation mechanism of the MEMS, the internal relevant information of the system is quantified and processed, and the dynamic model of the MEMS is established;

[0112] Establish a controller to achieve the goal of asymptotically stable control of the system signal;

[0113] Coordinate transformation of the MEMS dynamic model system state to obtain a new system, and bring the established controller into the new system;

[0114] Construct the Lyapunov function based on the new system, derive the Lyapunov function, and determine the size of the static gain coefficient;

[0115] The derivatives of the Lyapunov functions are sorted out, and the controller ensures that the signal of the MEMS is...

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Abstract

The invention discloses a control method and system of a micro-electro-mechanical system based on a gain strategy, including: according to the internal operation mechanism of the micro-electro-mechanical system, quantify and process internal relevant information of the system, and establish a dynamic model of the micro-electro-mechanical system; Establish a controller to achieve the goal of asymptotically stable control of the system signal; transform the coordinate transformation of the MEMS dynamic model system state to obtain a new system, and bring the established controller into the new system; construct Lia Puno based on the new system The function is derived from the Lyapunov function to determine the size of the static gain coefficient; the derivative of the Lyapunov function is sorted out, and the controller ensures that the signal of the MEMS is asymptotically stable. The invention effectively scales the relevant quantities in the design process through methods such as matrix properties and Young's inequality.

Description

technical field [0001] The invention belongs to the technical field of control, and in particular relates to a control method of a micro-electromechanical system based on a gain strategy. Background technique [0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art. [0003] MEMS technology is one of the cutting-edge technologies in the 21st century developed on the basis of micron or nanotechnology, which includes a series of technologies such as design, processing, manufacturing, measurement and control of micron or nanomaterials. It is a micro system that integrates mechanical components, optical systems, drive components, and electronic control systems into an integral unit. This kind of MEMS can not only collect, process and send information or instructions, but also take corresponding actions independently or according to external instructions according to the acquired i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B13/04
CPCG05B13/042
Inventor 朱菲李含丰段志宇张宪福常艳洁
Owner SHANDONG UNIV