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Semi-conductor device with longitudinal and transversal double-pole transistor

A technology of bipolar transistors and semiconductors, applied in semiconductor devices, semiconductor/solid-state device manufacturing, transistors, etc., can solve problems such as lowering and increasing substrate current

Inactive Publication Date: 2003-07-02
RENESAS ELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the P+ type collector diffusion layer does not completely surround the emitter diffusion layer, which causes h FE decreases, and the substrate current increases

Method used

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  • Semi-conductor device with longitudinal and transversal double-pole transistor
  • Semi-conductor device with longitudinal and transversal double-pole transistor
  • Semi-conductor device with longitudinal and transversal double-pole transistor

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Embodiment Construction

[0034] The best embodiment of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0035] 1(a) to 1(d) are cross-sectional views of a semiconductor device according to a first embodiment of the present invention, illustrating manufacturing steps thereof.

[0036] In Fig. 1 (a) to 1 (d), the semiconductor device of the present invention comprises the first conduction type semiconductor substrate and the vertical type bipolar transistor and the horizontal type pole transistor formed on this semiconductor substrate, the vertical type bipolar transistor It has a base region of the first conductivity type, and the lateral bipolar transistor has a base region of the second conductivity type; wherein, the collector region of the first conductivity type, or the collector region and the emitter region of the first conductivity type, and the The insulating diffusion regions of the first conductivity type that isolate the vertical type ...

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PUM

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Abstract

A semiconductor device has a P type semiconductor substrate 1, a vertical type bipolar transistor having an N type base region 4, a lateral type bipolar transistor having an N type base region 4 formed on the semiconductor substrate 1, an N type collector region 7a, and an N type emitter region 8, and a P type insulating diffusion region 7b for isolating between vertical and lateral type bipolar transistors, at least one of collector and emitter regions of the lateral bipolar transistor having substantially same depth of the insulating diffusion region 7b.

Description

technical field [0001] The present invention relates to a semiconductor device, and more particularly, the present invention relates to a semiconductor device having a vertical type bipolar transistor and a lateral type bipolar transistor. Background technique [0002] Bipolar transistors are widely used in almost all fields of semiconductor devices operating at high speeds, as well as semiconductor integrated circuits for home electronic equipment due to their high operating speed, high driving performance, and excellent analog characteristics. [0003] There are two types of bipolar transistors, namely NPN bipolar transistors and PNP bipolar transistors. In integrated circuits, vertical NPN transistors (hereinafter referred to as "NPN transistors") are usually used, which have three doped regions. The emitter region, the base region and the collector region are sequentially formed on the semiconductor substrate along the depth direction; and the lateral PNP transistor, (he...

Claims

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Application Information

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IPC IPC(8): H01L29/73H01L21/331H01L21/8224H01L21/8228H01L27/082H01L29/732
CPCH01L27/0821H01L21/8224H01L29/732
Inventor 高桥诚一
Owner RENESAS ELECTRONICS CORP