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No-margin PCD drill bit for semiconductor drilling

A semiconductor and margin technology, which is applied in the field of non-margin PCD drill bits for semiconductor drilling, can solve problems such as rough hole wall and reduce hole wall quality, improve hole wall quality, meet high quality requirements, and improve rigidity and strength Effect

Pending Publication Date: 2020-06-30
厦门厦芝科技工具有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Aiming at the deficiencies in the prior art, the present invention provides a kind of non-marginal PCD drill bit for semiconductor drilling, which mainly solves the problem that the drill bit for semiconductor drilling with a margin structure easily causes the hole wall to be rough during the drilling process. Technical problems such as reducing the quality of the hole wall

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  • No-margin PCD drill bit for semiconductor drilling
  • No-margin PCD drill bit for semiconductor drilling
  • No-margin PCD drill bit for semiconductor drilling

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0025] In describing the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", " The orientation or positional relationship indicated by "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, so as to Specific orientation configurations and operations, therefore, are not to be construed as limitations on the invention.

[0026] Please refer to the attached figure 1 to attach Figure 5 , in the present embodiment, a kind of non-edge type PCD drill bit for semiconductor drilling is applied to semiconductor wafer drilling, and compri...

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Abstract

The invention discloses a no-margin PCD drill bit for semiconductor drilling. The no-margin PCD drill bit comprises a drill rod made of PCD composite material, a tip angle is formed at the end part ofthe drill rod, and only a spiral chip groove is formed in the drill rod to form a no-margin structure. According to the no-margin PCD drill bit, only the spiral chip groove is formed in the drill rod, a margin is not machined on the drill rod, so that the drill rod forms the no-margin structure, the rigid strength of the drill rod is improved to a certain extent, and in the drilling process, thedrill rod with the no-margin structure is stressed uniformly in the grinding process of the inner wall of a hole, and through the grinding effect of the drill rod and the hole wall, the smoothness ofthe hole wall is high, no damage layer exists, the hole wall quality is greatly improved, and the high-quality requirement of semiconductor hole site machining can be met.

Description

technical field [0001] The invention relates to the technical field of drill bits, in particular to a no-edge PCD drill bit for semiconductor drilling. Background technique [0002] Most of the existing polycrystalline diamond (PCD) drill bits are welded with a PCD composite sheet at the front end of the tool handle. The PCD composite sheet has a double-layer structure, one side is a non-weldable polycrystalline diamond layer, and the other side is a weldable cemented carbide matrix layer. , the tungsten carbide matrix layer is generally made of tungsten steel, and the drill bits for semiconductor drilling in the prior art all have a margin structure, but in the process of semiconductor drilling, the drill bit mainly realizes drilling through grinding However, semiconductors used in some precision electronic equipment have high requirements for hole processing quality. When drilling with a drill with a margin structure, the friction between the margin of the drill and the ho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/02
CPCB28D5/021
Inventor 张金贤石锡祥
Owner 厦门厦芝科技工具有限公司