Aerosol conveying assistant device and conveying method

Abstract

The invention discloses an aerosol conveying assistant device and a conveying method. The aerosol conveying assistant device comprises an atomization generator, a mixing buffering chamber and a cross-shaped pipeline joint; at least two aerosol conveying branch pipes which are the same in structure are disposed between the atomization generator and the mixing buffering chamber in a parallel connection mode; each aerosol conveying branch pipe is in series connection with two electrically-operated valves and one buffering chamber, wherein the buffering chamber is located between the two electrically-operated valves, the two electrically-operated valves are opened and closed alternately, and an adjustable valve is connected to a control end of the buffering chamber and delivers outside gas into the buffering chamber; a collecting bottle is connected to the mixing buffering chamber, an inlet of the cross-shaped pipeline joint communicates with an outlet of the mixing buffering chamber; andelectrically-operated valves are disposed at three outlets of the cross-shaped pipeline joint correspondingly. Through the aerosol conveying assistant device, a thin film can be formed at high speed through liquid aerosol.

Description

technical field [0001] The invention belongs to the technical field of preparation of new materials, in particular to the preparation of film materials, and in particular relates to an aerosol transmission auxiliary device and a delivery method. Background technique [0002] Thin film materials have broad application fields, and related research work has been a hot spot in material science in the past 30 years. The preparation of thin film materials is the first step in research and application, so new preparation methods and equipment are constantly emerging. In general, the preparation methods of thin film materials are all pursuing high quality, high speed, low energy consumption, and low pollution emissions. However, most of the current mainstream preparation methods require the support of a vacuum environment, such as molecular beam epitaxy, sputtering, and chemical vapor deposition. Usually gaseous raw materials are input into the reaction chamber through pipelines, ...

AI Technical Summary

Problems solved by technology

[0004] However, when the liquid aerosol enters the reaction chamber to form a thin film, there are still two main technical problems that have not been effectively solved due to the large air pressure difference between the reaction chamber and the atomization generator: one is that the atomization source is continuous and stable. The problem of ground output; the second is the problem of liquid aerosol input control

In addition, liquid aerosols can contaminate pipelines

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