An aerosol transmission auxiliary device and delivery method

Abstract

The invention discloses an aerosol transmission auxiliary device and a delivery method, comprising an atomization generator, a mixing buffer chamber and a cross-shaped pipe joint, at least two aerosols with the same structure are arranged in parallel between the atomization generator and the mixing buffer chamber The aerosol transmission branch pipeline, each aerosol transmission branch pipeline is connected in series with two electric valves and a buffer chamber, wherein the buffer chamber is located between the two electric valves, and the two electric valves open and close alternately; the buffer chamber The control end of the control port is connected with an adjustable valve, and the adjustable valve inputs the external gas into the buffer chamber, and the mixing buffer chamber is connected with a collecting bottle; the inlet of the cross-shaped pipe joint communicates with the outlet of the mixing buffer chamber, The three outlets of the cross-shaped pipe joint are all provided with electric valves. With this device, a thin film can be formed at high speed using liquid aerosol.

Description

technical field [0001] The invention belongs to the technical field of preparation of new materials, in particular to the preparation of film materials, and in particular relates to an aerosol transmission auxiliary device and a delivery method. Background technique [0002] Thin film materials have broad application fields, and related research work has been a hot spot in material science in the past 30 years. The preparation of thin film materials is the first step in research and application, so new preparation methods and equipment are constantly emerging. In general, the preparation methods of thin film materials are all pursuing high quality, high speed, low energy consumption, and low pollution emissions. However, most of the current mainstream preparation methods require the support of a vacuum environment, such as molecular beam epitaxy, sputtering, and chemical vapor deposition. Usually gaseous raw materials are input into the reaction chamber through pipelines, ...

AI Technical Summary

Problems solved by technology

[0004] However, when the liquid aerosol enters the reaction chamber to form a thin film, there are still two main technical problems that have not been effectively solved due to the large air pressure difference between the reaction chamber and the atomization generator: one is that the atomization source is continuous and stable. The problem of ground output; the second is the problem of liquid aerosol input control

In addition, liquid aerosols can contaminate pipelines

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