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Wide-spectrum spherical transmission standard lens

A standard mirror and wide-spectrum technology, which is applied in the field of wide-spectrum spherical transmission standard mirrors, can solve problems such as low versatility and non-support for infrared interferometers, and achieve the effect of reducing processing difficulty and cost

Active Publication Date: 2020-07-03
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this mirror group broadens the working wavelength of the traditional spherical transmission standard mirror from a single wavelength of 632.8nm to three wavelengths of 632.8nm, 543.5nm and 532nm, its versatility is still low, and it cannot work in a certain wavelength range, and The operating wavelength of the spherical transmission standard mirror does not support the infrared interferometer

Method used

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  • Wide-spectrum spherical transmission standard lens
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  • Wide-spectrum spherical transmission standard lens

Examples

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Embodiment 1

[0027] Example 1, figure 2 It is a schematic diagram of a wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 0.75 and its working principle in Embodiment 1 of the present invention. It can be seen from the figure that when the incident parallel light wavelength is 532nm, the fourth lens 4 is far away from the third lens 3; when the incident parallel light wavelength is 1550nm, the fourth lens 4 is far away from the third lens 3. The third lens 3 is closer. image 3 It is the lens parameter table of the wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 0.75 in Embodiment 1 of the present invention. Figure 4 It is a fitting curve diagram of the relationship between the distance (a) between the third lens 3 and the fourth lens 4 described in embodiment 1 and the incident wavelength, the fitting curve is a smooth one-dimensional quartic function curve, and the The fourth lens 4 c...

Embodiment 2

[0028] Example 2, Figure 5 It is a schematic diagram of a wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 2.20 and its working principle in Embodiment 2 of the present invention. It can be seen from the figure that when the incident parallel light wavelength is 532nm, the fourth lens 4 is far away from the third lens 3; when the incident parallel light wavelength is 1550nm, the fourth lens 4 is far away from the third lens 3. The third lens 3 is closer. Image 6 It is the lens parameter table of the wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 2.20 in Embodiment 2 of the present invention. Figure 7 It is a fitting curve diagram of the relationship between the distance (b) between the third lens 3 and the fourth lens 4 described in embodiment 2 and the incident wavelength, the fitting curve is a smooth one-dimensional quartic function curve, and the The fourth lens 4 c...

Embodiment 3

[0029] Example 3, Figure 8 It is a schematic diagram of a wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 2.20 and its working principle in Embodiment 3 of the present invention. It can be seen from the figure that when the incident parallel light wavelength is 532nm, the fourth lens 4 is far away from the third lens 3; when the incident parallel light wavelength is 1550nm, the fourth lens 4 is far away from the third lens 3. The third lens 3 is closer. Figure 9It is the lens parameter table of the wide-spectrum spherical transmission standard mirror with an entrance pupil diameter of 100mm and F / 2.20 in Embodiment 3 of the present invention. Figure 10 It is a fitting curve diagram of the relationship between the distance (c) between the third lens 3 and the fourth lens 4 described in embodiment 3 and the incident wavelength, the fitting curve is a smooth one-dimensional quartic function curve, and the The fourth lens 4 ...

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Abstract

A wide-spectrum spherical transmission standard lens comprises a lens group formed by a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged in the incident direction of laser, and the fourth lens can move in the direction of an optical axis. The maximum clear aperture of the lens group is phi 100 mm, the length of the lens group is not larger than 150 mm, the F number design range is 0.75-3.30, the working waveband is 532-1550 nm, the F number is kept unchanged when the optical system works under different wavelengths, and the wave-front error peak-valley values are both smaller than or equal to 0.025 lambda. The lens can be applied to a multi-wavelength plane laser interferometer, and high-precision measurement of the wavefront parameters of the convex or concave optical element under various wavelengths is realized.

Description

technical field [0001] The invention relates to the measurement of wavefront parameters of components such as optical spherical surfaces and aspheric surfaces, in particular to a wide-spectrum spherical transmission standard mirror used for the interference measurement of spherical optical components. Background technique [0002] Laser interferometry is an optical metrology method based on the principle of light interference, and is currently recognized as one of the most effective and accurate technical means for detecting the wavefront quality of optical components. When using a laser plane interferometer to measure the surface parameters of a spherical element, a spherical transmission standard mirror is usually required to generate standard spherical measurement light and reference light in the optical path. The working wavelength of the commonly used laser interferometer at home and abroad is a single wavelength, mostly 632.8nm, 1053nm and 1064nm wavelength, and the wo...

Claims

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Application Information

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IPC IPC(8): G02B13/00G02B13/14G01M11/02
CPCG01M11/0207G02B13/008G02B13/146
Inventor 刘世杰鲁棋周游王圣浩徐天柱王微微邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI