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Inspection apparatus and inspection method

A technology of detection equipment and detection method, which is applied in the direction of measurement device, phase influence characteristic measurement, optical test defect/defect, etc., and can solve the problems of complex hardware structure and long measurement time of polarization measurement technology

Pending Publication Date: 2020-07-07
IND COOP FOUND CHONBUK NAT UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the polarization measurement technology using mechanical mechanism or electronic polarization modulation has the disadvantages of complex hardware structure and long measurement time

Method used

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  • Inspection apparatus and inspection method
  • Inspection apparatus and inspection method
  • Inspection apparatus and inspection method

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Embodiment Construction

[0042] Preferred embodiments of the present inventive concept will now be described hereinafter with reference to the accompanying drawings.

[0043] In the following embodiments, reflection-based detection is described, but the embodiments are similarly applicable to transmission-based detection.

[0044] figure 1 A simplified schematic diagram illustrating an example of a detection device according to a first embodiment of the inventive concept is shown. refer tofigure 1 , the detection device may include a light generator 10, a collimator lens 20, a first linear polarizer 30, a polarization interferometer 40, a line converter 61, a scanner 70, a second linear polarizer 80, an imaging lens 62, and an imaging spectrometer 90 .

[0045] The light generator 10 can generate white light. The light generator 10 may be a white light source having a uniform spectral distribution over a wide range of wavelengths λ. The light generator 10 may be, for example, a deuterium lamp or a...

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Abstract

Inspection apparatus and inspection method. The present inventive concepts comprises linearly polarizing light, splitting the linearly polarized light into a first light and a second light, modulatingthe first light and the second light to have a phase difference to produce an output wave light, converting the output wave light to have a linear line-shape in a first direction to radiate the converted output wave light to a measured object, receiving a measurement light coming out of the measured object and linearly polarizing the first light and the second light of the measurement light to generate an interference light, and obtaining from the interference light an image of the measured object. The measured object may be scanned in a second direction intersecting the first direction or may be scanned rotationally about an axis in a third direction perpendicular to the first and second directions to obtain spatio-spectral ellipsometric information (e.g., spectral ellipsometric cubic information) along two-dimensional spatial axes in real time speed.

Description

[0001] This application claims Korean Patent Application No. 10-2018-0173269 filed with the Korean Intellectual Property Office on December 31, 2018 and Korean Patent Application No. 10-2019-0121610 filed with the Korean Intellectual Property Office on October 1, 2019 The priority of the patent application, the entire disclosure of the Korean patent application is hereby incorporated by reference. technical field [0002] The inventive concept relates to a detection device and a detection method, and more particularly, to a detection device and a detection method that measure an image of a measured object. Background technique [0003] Imaging techniques have been widely used to investigate and study physical phenomena that change in real time and can be applied to various diagnostic and detection tools. Polarization-based imaging is one of the high-resolution and high-precision measurement techniques applicable to different fields. [0004] Most polarization measurement te...

Claims

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Application Information

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IPC IPC(8): G01N21/21G01N21/95G01J3/447G01B9/02
CPCG01N21/211G01N21/95G01J3/447G01B9/02029G01N2021/213G01N21/8806G01N2021/8848G01N21/8422G01N21/45
Inventor 金大锡
Owner IND COOP FOUND CHONBUK NAT UNIV