Optical system for inspecting super-large-aperture concave aspheric reflector

A spherical reflector and optical system technology, which is applied in the field of optical systems for aspheric inspection, can solve the problems of difficult processing and assembly, limit the caliber of inspectable paraboloids, and long inspection optical path length, and achieve easy processing and assembly, small caliber , the effect of high-precision inspection

Pending Publication Date: 2020-07-28
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As the diameter and relative aperture of the mirror to be inspected increase, the length of the inspection optical path will also become longer and longer, which will bring difficulties to processing and assembly
While using the compensating mirror to compensate the normal distance difference of the mirror to be inspected, the compensation capability of the compensating lens will also limit the caliber of the paraboloid that can be inspected

Method used

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  • Optical system for inspecting super-large-aperture concave aspheric reflector
  • Optical system for inspecting super-large-aperture concave aspheric reflector

Examples

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Embodiment Construction

[0012] Hereinafter, the present invention will be further described through the description of the embodiments and the accompanying drawings.

[0013] It is known that the diameter of the parabolic mirror to be inspected is 1200 mm, the relative aperture is 0.6, and the eccentricity is 1. The inspection optical path is composed of laser interferometer, self-alignment lens group and concave parabolic reflector to be inspected. The ratio of the correction lens group to the diameter of the concave parabolic reflector to be tested is 0.1.

[0014] The self-aligning lens group is located in front of the conjugate rear point of the parabolic mirror. The self-collimating lens group consists of two lenses, one negative and one positive. The incident height of the light before being reflected by the mirror to be inspected is very low on the lens group, where the lens group acts as a field mirror in the optical path. As for the optical path reflected by the mirror to be inspected, th...

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Abstract

The invention discloses an optical system for inspecting a super-large-aperture concave aspheric reflector. The inspection optical system is composed of a laser interferometer and an auto-collimationcorrection lens group. The auto-collimation correction lens group is located in front of the conjugate rear point of the concave aspheric reflector to be detected. Light emitted by the laser interferometer is refracted and imaged at a conjugate rear point of the concave aspheric reflector to be detected through the auto-collimation correction lens. And the light reflected by the reflector to be detected is imaged at the conjugate front point of the concave aspheric surface to be detected. Reflected light is refracted by the auto-collimation correction lens group, is auto-collimated and reflected on the surface far away from the concave aspheric reflector to be detected, and returns to the interferometer according to the original path. The optical system has the advantages that the opticalsystem can achieve high-precision inspection of the concave aspheric reflector with the ultra-large aperture and the ultra-large relative aperture. Meanwhile, the optical path length of the optical system is short, the caliber of the auto-collimation correction lens group is small, and machining, assembling and adjusting are convenient.

Description

technical field [0001] The invention relates to an optical system for inspecting an aspheric surface, in particular to an optical system for inspecting a concave aspheric mirror with a super-large diameter and a super-large relative aperture. Background technique [0002] With the development of space remote sensing, large-aperture space telescopes and high-energy laser systems, the demand for large-aperture and large relative aperture aspheric mirrors is also increasing. The primary mirror of the Hubble Space Telescope has an aperture of 2.4m, while the new generation of James Webb Space Telescope has a primary mirror aperture of 6.5m, which is composed of 18 pieces of 1.5m mirrors. These growing demands pose enormous challenges to optical processing and inspection. The most commonly used method for testing concave aspheric mirrors is the zero compensation method. The zero compensation method uses a lens placed behind the paraxial curvature center of the aspheric mirror t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
CPCG01M11/0207G01M11/0271
Inventor 赵鹏玮郑列华
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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