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A silicon-based filter chip with tunable bandwidth

A filter chip and silicon-based technology, applied in waveguide devices, circuits, electrical components, etc., can solve the problems of poor out-of-band suppression, increased application terminal volume, and low Q value, and achieve improved out-of-band suppression, The effect of wide adjustable range and high Q value

Active Publication Date: 2022-04-05
昆山鸿永微波科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to achieve wide spectrum coverage, the filter is usually implemented by separately designing each frequency band or broadband design, but each frequency band is designed separately, which will increase the size of the application terminal and increase the cost, while the broadband design will cause loss increase, decrease in efficiency, and performance degradation
[0003] The tunable filter can adaptively adjust the operating frequency or bandwidth of the filter according to the working conditions, and can realize the multi-functional application of a single device, which has become one of the research hotspots of the current filter. However, the existing tunable filter has problems of large size, Q Problems such as low value, poor out-of-band rejection, large loss, and difficulty in realizing multi-chip integration have affected the development of filters in miniaturization and chipping, and need to be improved

Method used

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  • A silicon-based filter chip with tunable bandwidth
  • A silicon-based filter chip with tunable bandwidth
  • A silicon-based filter chip with tunable bandwidth

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] like figure 1 and figure 2 As shown, the tunable element adopts a plurality of single-pole single-throw package switches, and a plurality of single-pole single-throw package switches 181 and 182 are arranged in parallel at the ends of the first slot line 131 and the second slot line 132, respectively, as shown in the figure. Figure 5 As shown, the multiple SPST package switches 181 and 182 straddle the ends of the first slot line 131 and the second slot line 132 respectively, and turn off D1-D2-D3 on the multiple SPST package switches 181 and 182 in turn. , the frequency-amplitude waveform is shown in Figure 7 As shown, it is gradually widened, and the widening step is determined by the distance S1 between the two SPST package switches. from Figure 7 It can be seen that the out-of-band of the filtered signal is very steep, and the out-of-band suppression degree is high.

Embodiment 2

[0045] like image 3 and Figure 4 As shown, the tunable element adopts a single SPMD switch chip, and the SPMT switch chips 281 and 282 are respectively disposed outside the ends of the first slot line 131 and the second slot line 132, as shown in the figure. Image 6 As shown, multiple points inside the ends of the first slot line 131 and the second slot line 132 are respectively connected with the multiple output ends of the corresponding single-pole multi-throw switch chip using metal binding wires, and the single-pole multi-throw switch chip The input terminal of the switch is connected with the corresponding first metal layer by metal binding wires, and the D1-D2-D3 of the single-pole multi-throw switch chips 281 and 282 can be turned off in turn, and a similar Figure 7 The waveform diagram is gradually widened, and the widening step is determined by the distance S2 between the points formed by the two top metal sheets. The top metal sheet is a metal sheet protruding f...

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Abstract

The invention discloses a silicon-based filter chip with tunable bandwidth, which comprises: n silicon cavity resonant units, each silicon cavity resonant unit includes a first metal layer, a high-resistance silicon medium layer and a second metal layer arranged up and down in sequence; Slot-line dual stopband resonators are distributed on the first metal layer of a single silicon cavity resonant unit or at the junction of the first metal layers of two adjacent silicon cavity resonant units in a row, including the first slot line and the second Two slot lines, and one end of the second slot line is in contact with the midpoint of the first slot line; the adjustable element is distributed on the first metal layer, and is respectively connected to the ends of the first slot line and the second slot line Correspondingly, the tunable element includes but is not limited to a single SPMT switch chip and multiple SPST packaged switches. Through the above method, the bandwidth-tunable silicon-based filter chip of the present invention has small volume, high Q value, low loss, improved out-of-band suppression, and realizes the bandwidth tuning function of the silicon-based filter chip.

Description

technical field [0001] The invention relates to the technical field of filter circuits, in particular to a silicon-based filter chip with tunable bandwidth. Background technique [0002] Filters play an important role in frequency selective filtering in radio frequency and microwave systems. Specifically, filters can pass electrical signals of a certain frequency and block other frequencies. In order to achieve wide spectrum coverage, the filter is usually implemented by separately designing each frequency band or broadband design, but each frequency band is designed separately, which will increase the size of the application terminal and increase the cost, while the broadband design will cause loss increase, decrease in efficiency, and deterioration in performance. [0003] The tunable filter can adaptively adjust the operating frequency or bandwidth of the filter according to the working conditions, and can realize the multi-functional application of a single device, whic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/208H01P1/203
CPCH01P1/208H01P1/203
Inventor 万晶梁晓新
Owner 昆山鸿永微波科技有限公司