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Silicon-based filter chip with tunable bandwidth

A filter chip and silicon-based technology, applied in waveguide devices, electrical components, circuits, etc., can solve problems such as poor out-of-band suppression, increased application terminal volume, and large loss, and achieve improved out-of-band suppression and The effect of wide tuning range and low loss

Active Publication Date: 2020-07-28
昆山鸿永微波科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to achieve wide spectrum coverage, the filter is usually implemented by separately designing each frequency band or broadband design, but each frequency band is designed separately, which will increase the size of the application terminal and increase the cost, while the broadband design will cause loss increase, decrease in efficiency, and performance degradation
[0003] The tunable filter can adaptively adjust the operating frequency or bandwidth of the filter according to the working conditions, and can realize the multi-functional application of a single device, which has become one of the research hotspots of the current filter. However, the existing tunable filter has problems of large size, Q Problems such as low value, poor out-of-band rejection, large loss, and difficulty in realizing multi-chip integration have affected the development of filters in miniaturization and chipping, and need to be improved

Method used

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  • Silicon-based filter chip with tunable bandwidth
  • Silicon-based filter chip with tunable bandwidth
  • Silicon-based filter chip with tunable bandwidth

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] like figure 1 and figure 2 As shown, the tunable element adopts multiple single-pole single-throw packaged switches, and multiple single-pole single-throw packaged switches 181 and 182 are arranged side by side at the ends of the first slot line 131 and the second slot line 132, as shown in Figure 5 As shown, a plurality of SPST encapsulated switches 181 and 182 straddle the ends of the first slot line 131 and the second slot line 132 respectively, and sequentially close D1-D2-D3 on the multiple SPST encapsulated switches 181 and 182 , the frequency-amplitude waveform is shown in Figure 7 As shown, the widening step is gradually determined by the distance S1 between two single-pole single-throw package switches. from Figure 7 It can be seen that the out-of-band of the filtered signal is very steep, and the out-of-band rejection is relatively high.

Embodiment 2

[0045] like image 3 and Figure 4 As shown, the tunable element adopts a single single-pole multi-throw switch chip, and the single-pole multi-throw switch chips 281 and 282 are respectively arranged outside the ends of the first slot line 131 and the second slot line 132, as Figure 6 As shown, multiple points inside the ends of the first slot line 131 and the second slot line 132 are respectively connected to multiple output terminals of the corresponding single-pole multi-throw switch chip by metal binding wires, and the single-pole multi-throw switch chip The input end of the corresponding first metal layer is connected with a metal binding wire, and the D1-D2-D3 of the single-pole multi-throw switch chip 281 and 282 can be closed in turn, and a similar Figure 7 Waveform diagram, widening step by step, the step of widening is determined by the distance S2 between the points formed by the two top metal sheets, the top metal sheet is the inner protruding metal sheet at th...

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Abstract

The invention discloses a silicon-based filter chip with tunable bandwidth, which comprises n silicon cavity resonance units, wherein each silicon cavity resonance unit comprises a first metal layer,a high-resistance silicon dielectric layer and a second metal layer which are sequentially arranged from top to bottom; slot line type double-stop-band resonators which are distributed on the first metal layer of a single silicon cavity resonance unit or at the joint of the first metal layers of two adjacent silicon cavity resonance units on a row, wherein each slot line type double-stop-band resonator comprises a first slot line and a second slot line, and one end of each second slot line is connected with the midpoint of the corresponding first slot line; and tunable elements which are distributed on the first metal layer and correspond to the tail ends of the first slot line and the second slot line respectively, wherein each tunable element comprises but is not limited to a single single-pole multi-throw switch chip and a plurality of single-pole single-throw packaging switches. By means of the mode, the silicon-based filter chip is small in size, high in Q value and small in loss,the out-of-band rejection degree is improved, and the bandwidth tuning function of the silicon-based filter chip is achieved.

Description

technical field [0001] The invention relates to the technical field of filter circuits, in particular to a silicon-based filter chip with tunable bandwidth. Background technique [0002] Filters play an important role in frequency selective filtering in radio frequency and microwave systems. Specifically, filters can pass electrical signals of a certain frequency and block other frequencies. In order to achieve wide spectrum coverage, the filter is usually implemented by separately designing each frequency band or broadband design, but each frequency band is designed separately, which will increase the size of the application terminal and increase the cost, while the broadband design will cause loss increase, decrease in efficiency, and deterioration in performance. [0003] The tunable filter can adaptively adjust the operating frequency or bandwidth of the filter according to the working conditions, and can realize the multi-functional application of a single device, whic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P1/208H01P1/203
CPCH01P1/208H01P1/203
Inventor 万晶梁晓新
Owner 昆山鸿永微波科技有限公司