Cyclic recycling equipment for carrier

Abstract

The invention provides cyclic recycling equipment for a carrier. The cyclic recycling equipment comprises a feeding mechanism, a discharging mechanism and a backflow conveying belt; the feeding mechanism and the discharging mechanism are the same in structure, each of the feeding mechanism and the discharging mechanism comprises a conveying table, a roller belt arranged over the conveying table, alifting guide rail arranged beside the conveying table and the roller belt, a lifting platform arranged on the lifting guide rail and a taking and placing mechanism arranged on the lifting platform;the roller belt in the discharging mechanism is connected with an inlet of the backflow conveying belt, and the roller belt in the feeding mechanism is connected with an outlet of the backflow conveying belt; each taking and placing mechanism comprises at least two taking and placing strips capable of extending towards the corresponding roller belt and the corresponding conveying table, and a jacking mechanism capable of jacking the carrier placed on the conveying table to be higher than the conveying table is arranged in each conveying table; and a side supporting plate, used for supporting rollers, of each roller belt is provided with a notch extending downwards from the upper surface of the side supporting plate at the position of a gap between the corresponding rollers, and each takingand placing an extend into the corresponding notch. According to the cyclic recycling equipment, the carrier can be automatically returned to a feeding machine from a discharging machine, and carrierrecycling automation is achieved.

Description

technical field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a carrier recycling equipment. Background technique

[0002] In the post-production process of semiconductor chips, with the continuous improvement of automation, reducing the interference of human operations and ensuring the safety of operators has always been an eternal theme in the automation industry. In the chip manufacturing process, there are often some specific processes that require special clamping tools to fix the product, such as reflow, or cleaning, etc. The product needs to be fixed to ensure that it will not be washed away when entering the reflow process , to ensure product safety.

[0003] In this process, we receive the product from the upstream, and fix the product on the carrier provided by us in the carrier feeder, and then send the product clamped by the carrier into the reflow process. After a period of reflow, The product will flow ou...

Images