Capillary channel environment sensor and preparation method thereof

Abstract

The embodiment of the invention discloses a capillary channel environment sensor and a preparation method thereof. The capillary channel environment sensor comprises a transmission cavity and at leastone capillary channel, wherein the sectional area of the transmission cavity is larger than that of the capillary channel, and one end of the capillary channel is communicated with the transmission cavity; an elastic transmission diaphragm is arranged between the transmission cavity and an external measurement environment; a positioning liquid drop is arranged in the capillary channel and make tight contact with the inner wall of the capillary channel, and the positioning liquid drop makes tight contact with a transmission medium. Through the transmission cavity and the capillary channel which are connected with each other, the sectional area of the transmission cavity is larger than that of the capillary channel, and by means of the volume difference between the transmission cavity and the capillary channel, small displacement under the large volume is converted into remarkable displacement under the small volume; as the capillary channel is internally provided with the positioning liquid drop, and the capillary channel environment sensor comprises a magnetic induction element, the magnetic induction element enables the displacement change to pass through the intermediate variable based on the movement of the positioning liquid drop, and high-sensitivity and low-power-consumption detection is realized.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of environmental parameter detection sensors, in particular to a capillary channel environmental sensor and a preparation method thereof. Background technique [0002] At present, environmental sensors include temperature sensors, pressure sensors, displacement sensors, vibration sensors, microphones and a series of subdivision fields. The chip design, material, process, and packaging structure of each subdivision field are quite different. Environmental sensors are integrated, or the integration process is complex; in addition, the current sensor chips such as pressure sensors, displacement sensors, vibration sensors, and microphones are difficult to meet the needs of high signal-to-noise ratio and low power consumption. Contents of the invention [0003] In view of this, the embodiment of the present invention provides a capillary channel environmental sensor and its preparation met...

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Problems solved by technology

[0002] At present, environmental sensors include temperature sensors, pressure sensors, displacement sensors, vibration sensors, microphones and a series of subdivision fields. The chip design, material, process, and packaging structure of each subdivision field are quite different. Environmental sensors are integrated, or the integration process is complex; in addition, the current sensor chips such as pressure sensors, displacement sensors, vibration sensors, and microphones are difficult to meet the needs of high signal-to-noise ratio and low power consumption

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