Optical fiber pressure sensor based on soft silicon diaphragm and detection method thereof

Abstract

The invention discloses an optical fiber pressure sensor based on a soft silicon diaphragm and a detection method thereof. The pressure sensor comprises a pipe body, the soft silicon diaphragm and anoptical fiber. The optical fiber is arranged in the pipe body and is close to a silicon film, and the film is attached to a light path formed by an input optical fiber, such as the front end, the inner side or the lateral surface of the pipe orifice. The ultrathin silicon diaphragm is prepared from silica gel, when the external pressure changes,, the film deforms, the vibration deformation quantity of the silicon membrane can be surveyed through direct detection or detection based on the coherent light interference principle, the deformation quantity of the silicon film is measured, a corresponding pressure value and a measurable pressure range are set, the function relation between the pressure value and the deformation depth within the measurable range is obtained through calculation, and thus the effect of pressure testing can be achieved.

Description

technical field [0001] The invention relates to the technical field of miniature sensors, in particular to an optical fiber pressure sensor based on a soft silicon diaphragm and a detection method thereof. Background technique [0002] Optical fiber sensing technology was first extensively studied in Western countries such as the United States and Europe, and has been approaching maturity since its development, and is developing in the direction of high performance and high practicability. [0003] Generally there are following shortcoming in prior art: [0004] 1. Most of the diaphragm-type pressure measuring probes used today have complex membrane-making methods and high costs, and are not suitable for animal in vivo testing. [0005] 2. The preparation of most pressure measuring probes is too complicated. The film collection and adhesion process needs to be operated under a microscope. The requirements for the operating environment and experimental materials are high, an...

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Problems solved by technology

[0004] 1. Most of the diaphragm-type pressure measuring probes used today are complicated in membrane production and high in cost, and are not suitable for in vivo detection in animals.

[0005] 2. The preparation of most pressure measuring probes is too complicated. The film collection and adhesion process needs to be operated under a microscope. The requirements for the operating environment and experimental materials are high, and it is generally not easy to prepare

[0006] 3. General pressure measuring probes are not suitable for the detection of some special objects to be measured, which are easy to conduct and pollute, and are susceptible to electromagnetic interference.

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