A non-jet atmospheric pressure large-volume microwave plasma generation method

Abstract

The invention discloses a method for generating non-jet flow atmospheric pressure large-volume microwave plasma, which belongs to the field of microwave plasma technology, and is characterized in that it comprises the following steps: a. Start the igniter, inject the generated small plasma or chemical flame into In the conical cavity; b. Start the microwave source, and input microwaves into the reaction cavity through the microwave feed port; c. Turn off the igniter, increase the microwave power of the microwave source, and the small plasma in the conical cavity is amplified to obtain a non-jet flow , Atmospheric pressure high power and large volume microwave plasma. The invention can achieve sufficient and uniform heating of the gas to be treated, improve the reaction efficiency, and can be uniformly distributed within the set space range, can effectively prevent destructive breakdown discharge, and is easy to control the heat dissipation balance, in the case of minimizing heat dissipation Under this condition, the temperature of the entire generator is guaranteed to be reasonable, the structure is stable, and long-term operation stability is realized; the entire operation process is simple, reliable, and easy to control.

Description

technical field

[0001] The invention relates to the technical field of microwave plasma, in particular to a non-jet atmospheric pressure large-volume microwave plasma generation method. Background technique

[0002] Plasma is the fourth state of existence of matter, usually refers to ionized or partially ionized conductive gas, which includes six typical particles: electrons, positive ions, negative ions, excited atoms or molecules, ground state atoms or molecules and photons. Whether it is partially ionized or fully ionized; the total number of negative charges is equal to the total number of positive charges, so it is called plasma, and it is generally electrically neutral in time and space at the macroscopic scale. The stricter definition is: Plasma is a collection of electrons, positive ions and neutral particles that are electrically neutral as a whole.

[0003] Plasma is divided into two categories according to temperature: high temperature plasma and low temperature...

Examples

Embodiment 1

[0050] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0051] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0052] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0053] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0054] This embodiment is the most basic...

Embodiment 2

[0056] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0057] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0058] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0059] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0060] It also includes step d, by feedi...

Embodiment 3

[0064] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0065] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0066] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0067] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0068] It also includes step d, by feedi...

technical field

[0001] The invention relates to the technical field of microwave plasma, in particular to a non-jet atmospheric pressure large-volume microwave plasma generation method. Background technique

[0002] Plasma is the fourth state of existence of matter, usually refers to ionized or partially ionized conductive gas, which includes six typical particles: electrons, positive ions, negative ions, excited atoms or molecules, ground state atoms or molecules and photons. Whether it is partially ionized or fully ionized; the total number of negative charges is equal to the total number of positive charges, so it is called plasma, and it is generally electrically neutral in time and space at the macroscopic scale. The stricter definition is: Plasma is a collection of electrons, positive ions and neutral particles that are electrically neutral as a whole.

[0003] Plasma is divided into two categories according to temperature: high temperature plasma and low temperature...

Examples

Embodiment 1

[0050] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0051] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0052] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0053] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0054] This embodiment is the most basic...

Embodiment 2

[0056] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0057] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0058] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0059] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0060] It also includes step d, by feedi...

Embodiment 3

[0064] A non-jet atmospheric pressure large-volume microwave plasma generation method, comprising the following steps:

[0065] a. Start the igniter 1, and spray the generated small plasma or chemical flame into the conical cavity 2 from the ignition channel 17 on the reaction chamber of the plasma generator;

[0066] b. Start the microwave source 3, input microwaves into the reaction chamber through the microwave feed port 4, and the microwaves act on the small plasma or chemical flame, so that the microwave energy provided by the microwave source is obtained on the small plasma or chemical flame, and is converted into stable Small microwave plasma, which is concentrated on the top of the conical cavity 2;

[0067] c. Turn off the igniter 1, increase the microwave power of the microwave source 3, and the small plasma in the conical cavity 2 is amplified to obtain non-jet, normal pressure high power and large volume microwave plasma.

[0068] It also includes step d, by feedi...

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