Sea urchin-shaped oxide-based composite film bionic pressure sensor and preparation method thereof

Abstract

The invention relates to a sea urchin-shaped oxide-based composite film bionic pressure sensor. The sensor comprises a packaging layer, flexible substrates, a sensitive film and an electrode; the flexible substrates are connected to the upper part and lower part of the sensitive film; sea urchin-shaped oxide-based composite films cover the opposite surfaces of the above flexible substrate and thelower flexible substrate; and the sea urchin-shaped oxide-based composite films are connected with external electrodes. The sea urchin-shaped oxide-conductive material composite films coat the flexible substrates, and therefore, on the one hand, a sea urchin-shaped metal oxide plays a role in supporting a conductive material, and the deformability of the conductive material under the action of pressure is improved; on the other hand, the surface of the sea urchin-shaped metal oxide is coated with the conductive material, and the defects that the sea urchin-shaped metal oxide is poor in conductivity, high in power consumption and the like are overcome. Therefore, the sea urchin-shaped metal oxide and the conductive material are compounded, so that the sensor has the advantages of high sensitivity, low power consumption, simple preparation method, low cost, easiness in mass production and the like.

Description

technical field [0001] The invention relates to the technical fields of pressure sensors, composite nanomaterials and flexible wearable electronics, in particular to a sea urchin-like oxide-based composite membrane bionic pressure sensor and a preparation method thereof. Background technique [0002] Flexible pressure sensor is a new type of sensor that converts pressure signals into electrical signals. It has broad application prospects in the fields of intelligent robots, intelligent prosthetics, wearable electronics, health and medical monitoring, and human-computer interaction. Pressure-sensitive materials are an important factor restricting the performance of pressure sensors, and have received extensive attention from researchers in recent years. Conductive materials such as carbon materials, conductive polymers, and metals have excellent electrical conductivity, which can quickly convert pressure signals into electrical signals, and are widely used in flexible pressur...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a sea urchin oxide-based composite film bionic pressure sensor and The preparation method is to coat the sea urchin-like oxide-conductive material composite film on the flexible substrate, and then complete the preparation of the bionic pressure sensor after drawing out the electrodes and packaging. On the one hand, the sea urchin-like metal oxide plays a supporting role for the conductive material , improving the deformation ability of the conductive material under pressure; on the other hand, the conductive material is coated on the surface of the sea urchin-like metal oxide, which makes up for the poor conductivity and high power consumption of the sea urchin-like metal oxide.

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