Power cycling test apparatus and system for semiconductor devices

Abstract

The invention belongs to the field of semiconductor testing, and provides a power cycle test device and system for semiconductor devices. The system includes an industrial computer, a power-on device, a thermal tester and a test device. equipment and temperature detection equipment; the power-on equipment cyclically powers up the electrode equipment within a preset number of cycles; the thermal tester obtains the voltage of the device under test, and determines the voltage corresponding to the voltage of the device under test according to the pre-calibrated voltage junction temperature curve. Junction temperature; the industrial computer controls the power-on device to cycle power on the electrode within a preset number of cycles, and also obtains the case temperature and junction temperature of the device under test, if any of the case temperature, junction temperature and junction temperature variation are not satisfied When the temperature condition is preset, the power-on equipment is controlled to stop working, so as to ensure the smooth progress of the power cycle test and high reliability. At the same time, the invention uses the mechanical structure to fasten, avoids problems such as damage, connection falling off, aging, etc., can withstand large current, and has a long service life. long.

Description

technical field [0001] The invention belongs to the field of semiconductor testing, and more particularly relates to a power cycle testing device and system for semiconductor devices. Background technique [0002] Power electronic devices are concentrated in the three major product areas of motor drive, charging and discharging, and power conversion. With the development of the third-generation semiconductor technology and the new energy vehicle industry, power electronic devices have also ushered in new development opportunities, and market demand has grown rapidly. , only for new energy vehicles, the annual domestic demand for automotive-grade IGBT modules is several million, and power electronic devices are gradually becoming a hot spot in the semiconductor industry. [0003] The rapid development of related industries provides a broad market demand for reliability testing of power electronic devices. Life test is currently the most commonly used and effective reliabilit...

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Problems solved by technology

[0005] In view of this, the embodiment of the present invention provides a power cycle test device and system for semiconductor devices to solve the problems that the control of junction temperature and case temperature in traditional power cycle tests does not meet the experimental requirements, and the test device is prone to aging and high cost.

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