Phase change switch based on gallium-indium-tin liquid metal
A liquid metal, gallium indium tin technology, applied in the direction of electric switches, electrical components, circuits, etc., can solve problems such as the inability to achieve effective control of large currents, and achieve good conductivity, fast response, and miniaturization.
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[0027] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] The present invention is a phase change switch based on gallium indium tin liquid metal, such as figure 1 and figure 2 As shown, it includes a control layer 100, a gallium indium tin alloy 200, and an encapsulation layer 300. The encapsulation layer 300 has a semi-open cavity structure. The encapsulation layer 300 and the control layer 100 form a closed cavity, and the gallium indium tin alloy 200 is encapsulated in a vacuum. in a closed cavity.
[0029] Such as image 3 As shown, the control layer 100 includes a switch region 102 connected to the encapsulation layer 300, and also includes an insulating layer 103. The insulating layer 103 is connected to the bottom of the switch region 102 by chemical deposition. The bottom of the insulating layer 103 is connected to the cold and hot regions 101, and the switch region The end of 10...
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