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Automatic wafer sorting machine

An automatic sorting and wafer technology, applied in the direction of sorting, conveyor objects, electrical components, etc., can solve the problems of inability to sort substrate numbers, low sorting efficiency, easy sorting errors, etc., to save installation space, Improve sorting efficiency and place firmly

Active Publication Date: 2020-08-14
SHANDONG NOVOSHINE OPTOELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Specifically, the technical problem to be solved by the present invention is to provide an automatic wafer sorting machine to solve the problems of low sorting efficiency, inability to sort substrate numbers, and easy sorting errors existing in manual wafer sorting. and scratch wafer technical issues

Method used

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Embodiment Construction

[0058] The present invention will be further described below in conjunction with specific examples. However, the uses and purposes of these exemplary embodiments are only used to illustrate the present invention, and do not constitute any form of limitation to the actual protection scope of the present invention, nor limit the protection scope of the present invention thereto.

[0059] Such as Figure 1 to Figure 8 As shown, this embodiment provides an automatic wafer sorter, including a rack 1, a material rack 2, a wafer pick-and-place device, and a controller.

[0060] The material rack 2 is fixedly installed in the frame 1, and is used for placing flower baskets 36. The material rack 2 is divided into an area to be sorted and an area to be sorted. There are respectively flower basket positioning mechanisms corresponding to the placement positions of the flower basket.

[0061] The wafer pick-and-place device is arranged corresponding to the rack 2, including a mounting fr...

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Abstract

The invention belongs to the technical field of wafer production equipment and provides an automatic wafer sorting machine which comprises a rack, a material frame, a wafer taking and placing device and a controller. The material frame is divided into a to-be-sorted area and a sorting completion area, and basket positioning mechanisms corresponding to basket placement positions are arranged on theto-be-sorted area and the sorting completion area respectively; the wafer taking and placing device comprises a mounting frame, an installation plate driven by a first driving device is installed onthe installation frame in the X-axis direction in a sliding mode, an installation base driven by a second driving device is arranged on the installation plate, the installation base slides in the Z-axis direction, a supporting plate driven by a third driving device is installed on the installation base in the Y-axis direction in a sliding mode, and a wafer supporting part is arranged at the tail end of the supporting plate. The controller is respectively connected with the basket positioning mechanisms, the first driving device, the second driving device and the third driving device. Comparedwith traditional manual wafer sorting, the sorting efficiency is greatly improved, sorting errors are effectively avoided, the wafers cannot be scratched, and the substrate numbers of the sorted wafers can be sorted and placed.

Description

technical field [0001] The invention relates to the technical field of wafer production equipment, in particular to an automatic wafer sorter. Background technique [0002] Wafer refers to the silicon wafer used to make silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. In the process of wafer processing, due to external factors, the type and quality of the produced wafers will be different. Usually, the AOI test is carried out in the automatic optical inspection machine. After the type and quality of the wafer are detected, then according to the type and quality Different wafers are sorted to separate different wafers. During the inspection and sorting process of wafers, flower baskets are usually used to place, store, transport and transport wafers to simplify transportation and minimize the risk of contamination; in the sorting process, flower baskets are divided into flower baskets to be sorted and returned There are wafers ...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/677B07C5/02B07C5/34B07C5/36B07C5/38
CPCB07C5/02B07C5/3404B07C5/362B07C5/38H01L21/67259H01L21/67271H01L21/67742
Inventor 李凯杰赵成浩郭明灿臧运凤
Owner SHANDONG NOVOSHINE OPTOELECTRONICS CO LTD
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