Micro-nano structure measurement and processing method

Abstract

The invention relates to a micro-nano structure measurement method and a processing method. The measurement method comprises the following steps: obtaining a real-time microscopic image of a micro-nano structure, and the micro-nano structure comprises at least one micro-nano unit; identifying and fitting the microscopic image to obtain a fitting graph of the micro-nano unit; and measuring the fitting graph to obtain the size and position information of the at least one micro-nano unit. The invention provides a method for measuring a micro-nano structure. A real-time microscopic image of a micro-nano structure is obtained; a fitting graph which is most consistent with the outline of the micro-nano unit is obtained through recognition and fitting; the measurement of the fitting pattern is equivalent to the measurement of the corresponding micro-nano unit, so that the accurate size and position information of the micro-nano unit is obtained. Meanwhile, the measurement method can be executed in the machining process, so that the machining process of the micro-nano structure is conveniently monitored in real time, and the high-precision machining of the micro-nano structure is facilitated.

Description

technical field [0001] This field belongs to the field of precision machining, and in particular relates to a high-precision machining method for micro-nano structures. Background technique [0002] In recent years, as an emerging precision processing technology, micro-nano processing has been highly valued by people in the field, and it has revolutionary significance for industries requiring high precision such as medical treatment and semiconductors. [0003] Existing micro-nano processing schemes generally use the simple drawing software provided by the equipment manufacturer to design corresponding patterns for the pre-processed micro-nano structures on the computer of the processing equipment, and then execute the processing program until the processing is completed. In this process, due to the instability of energy sources such as ion sources, even if the same parameters are used for micro-nano processing, the size and position of the processed micro-nano structures wi...

AI Technical Summary

Problems solved by technology

In this process, due to the instability of energy sources such as ion sources, even if the same parameters are used for micro-nano processing, the size and position of the processed micro-nano structures will change to a certain extent, and because the micro-nano structures are more complex and Its size is on the nanoscale, making it difficult to measure its precise size

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