Cleaning tank structure on semiconductor silicon wafer cleaning machine
A silicon wafer cleaning and cleaning tank technology, which is used in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of high consumption of pure water and increased consumption of pure water, and achieve the effect of saving water and energy and reducing consumption.
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[0024] Example: see Figure 1 to 6 As shown, a cleaning tank structure on a semiconductor silicon wafer cleaning machine includes a cleaning table 1 on the cleaning machine. The cleaning table 1 is inserted and fixed with a chemical tank 2 and a pure water tank 3, and the chemical tank 2 and the pure water tank 3 are both A silicon wafer supporting bracket 4 is inserted. The silicon wafer supporting bracket 4 includes a rectangular frame body 41. A number of opposed slots 411 are formed on the inner walls of the upper front and rear sides of the frame body 41. The inner wall of the side is formed with a slot connected to the slot 411 and passing through the lower end surface of the frame 41. The outer walls of the frame 41 on both sides of the slot are formed with inlet and outlet slots 412. The upper and lower bottom surfaces of the inlet and outlet slots 412 A number of opposing positioning grooves 413 are formed. A number of horizontal support rods 42 are inserted into the p...
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