Furnace tube modular mechanism suitable for PECVD equipment

Abstract

The invention discloses a furnace tube modular mechanism suitable for PECVD equipment. The mechanism comprises an internally hollowed single-sided open rack, and at least one furnace body assembly arranged inside the single-sided open rack, wherein the single-sided open rack comprises an integral fixing frame; and a partition frame arranged inside the integral fixing frame, the partition frame partitions the single-sided open rack into a water pipe placing cavity and a furnace body placing cavity, and the side end of the furnace body placing cavity is provided with an opening for taking and placing the furnace body assembly. According to the mechanism, a furnace body device is put into a supporting frame to form a whole, so that the furnace body assembly can be conveniently taken out fromthe side end of the single-side open rack during maintenance, a quartz tube does not need to be drawn out of the two sides of a furnace body, so that the purpose of convenient maintenance is achieved,and meanwhile, the beneficial effects that the structure is simple, assembly is convenient, the working efficiency is improved, and the production cost is reduced are achieved.

Description

technical field [0001] The invention relates to the field of tubular PECVD furnace tubes. More specifically, the present invention relates to a furnace tube modular mechanism suitable for PECVD equipment. Background technique [0002] A solar cell is a semiconductor device with light-to-electricity conversion characteristics. It directly converts solar radiation energy into direct current. It is the most basic unit of photovoltaic power generation. In fact, part of the sunlight will be reflected. Even if the silicon surface is designed as a suede surface, although the incident light will produce multiple reflections to increase the light absorption rate, part of the sunlight will still be reflected. According to calculations , the reflection loss rate of light on the silicon surface is as high as about 35%. The anti-reflection coating can greatly improve the solar light utilization rate of the battery sheet, which helps to increase the photogenerated current density, thereb...

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Problems solved by technology

[0004] As the production capacity requirements of PECVD equipment are getting higher and higher, from the initial single-tube 240 pieces to the current 432 pieces, the size of the graphite boat has become larger and larger, and the PECVD equipment has also developed from the original two-tube to the current five-piece The frequency of use of the furnace tube in a single piece of equipment is also increasing. Generally, after one to three months of use in the factory, the quartz tube needs to be pulled out from the furnace tube for cleaning. Because there is a clean table feeding paddle at the front of the furnace tube There is a gas source cabinet vacuum pipe at the end of the furnace tube. It is very troublesome to pull out the furnace tube from both sides, and it is very time-consuming and labor-intensive during equipment maintenance.

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