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Application and device of a differential aerodynamic design in gas cluster beam source

An aerodynamic and gas cluster technology, applied in pump devices, mechanical equipment, machines/engines, etc., can solve the problem of expensive pump sets, achieve effective aerodynamic isolation, improve air pressure and condensation efficiency, and reduce consumption. Effect

Active Publication Date: 2021-08-27
NANJING UNIV
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Problems solved by technology

However, to further increase the vacuum degree between the two stages of the differential system requires a huge pumping speed of the vacuum pump, which is difficult to meet for general vacuum pump sets, and qualified pump sets are expensive

Method used

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  • Application and device of a differential aerodynamic design in gas cluster beam source
  • Application and device of a differential aerodynamic design in gas cluster beam source
  • Application and device of a differential aerodynamic design in gas cluster beam source

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Embodiment Construction

[0034] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0035] Such as figure 1 Shown, the present invention comprises: differential vacuum pump group comprises molecular pump 1, mechanical pump 2, has drawn the inlet that differential vacuum pump group provides among the figure; Track 4, Tesla non-movable microvalve half-circle track 5, straight track and semi-circle track externally controlled (aperture type) communication valve 6, external multi-channel controller 7. Condensation chamber outlet and high pressure chamber 8. High-pressure airflow 9, reverse flow resistance 10. Annular chamber flow 11.

[0036] Vacuum pump set of molecular pump mechanical pump: obtain high vacuum chamber environment.

[0037] Condensation chamber: The condensation chamber is the high pressure part of the differential pumping system, which can be used for the condensation growth of nanoparticles.

[0038] The Tesla non-m...

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Abstract

A differential aerodynamic design is used in the application of the gas cluster beam source, using a Tesla-type non-movable microvalve suitable for the outlet of the condensation chamber of the gas-phase condensed cluster source; The directionality of low resistance to flow, under the condition of relatively low vacuum pump group and condensing gas flow rate, maintain the high pressure of the condensation chamber and the low background pressure of the vacuum chamber; The direction of the cluster source from the high-pressure condensing chamber to the low-pressure vacuum chamber is reversed, so that the gas in the condensing chamber is not easy to enter the vacuum chamber; at the same time, the number of semi-circular orbits connected with the straight-shaped orbital interface in the Tesla non-movable microvalve is controlled, Adjust the one-way flow resistance of the Tesla immovable microvalve; the high-pressure condensation chamber realizes more effective cluster and nanoparticle synthesis.

Description

technical field [0001] The invention relates to a novel differential aerodynamic design, in particular to a design for effectively separating high and low pressure regions of gas phase condensation cluster sources. Background technique [0002] Different vacuum environments are realized based on the differential vacuum system between the traditional condensation chamber and the vacuum device. Generally, the condensation chamber is 10 1 Pa level, while the vacuum system is 10 -4 Pa level. However, to further increase the vacuum degree between the two stages of the differential system requires a huge pumping speed of the vacuum pump, which is difficult to meet for general vacuum pump sets, and qualified pump sets are expensive. Therefore, it is of great significance to design a differential vacuum system based on aerodynamics to reduce the diffusion of air pressure in the condensation chamber of low vacuum to the high vacuum chamber. The inventor team has applied for a num...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56F04B37/14F04B39/10F04B41/06F04B49/22
CPCC23C14/56F04B37/14F04B39/10F04B41/06F04B49/22
Inventor 曹路宋凤麒
Owner NANJING UNIV
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